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New fabrication method for micro-pyramidal vertical probe array for probe cards

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Abstract

This paper presents a novel, precision process for fabricating a micro metal vertical probe array with various tip angles. The fabrication process includes an inclined and multiple-exposure in ultraviolet (UV) lithographic and Ni electroforming technology. Because of the light passing through an optical transparent homogenous material, the materials’ refractive index results in light path deflection. By changing the photomask and workpiece inclination, controllable various tip angles can be fabricated. The experimental results showed that micro metal vertical probes with 54°, 60° and 68° tip angles are achieved. The micro-pyramidal vertical probe array can be used in vertical-type probe cards without the conventional complicated assembly.

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References

  • Chen L, El-Gomati MM (1999) Field emission studies of tungsten-coated silicon-based field emitters. Ultramicroscopy 79:135–140. doi:10.1016/S0304-3991(99)00074-1

    Article  Google Scholar 

  • Henry S, McAllister DV, Allen M, Prausnitz M (2000) Microfabricated microneedles: a novel approach to transdermal drug delivery. J Pharm Sci 87:922–925. doi:10.1021/js980042

    Article  Google Scholar 

  • Huang SH, Tseng FG (2005) Development of a monolithic total internal reflection-based biochip utilizing a microprism array for fluorescence sensing. J Micromech Microeng 15:2235–2242. doi:10.1088/0960-1317/15/12/004

    Article  Google Scholar 

  • Kataoka K, Itoh T, Inoue K, Suga T (2004) Multi layer electroplated micro spring array for MEMS probe card. In: MEMS2004, 17th IEEE Conf., pp 733–736

  • Kim YM, Yoon HC, Lee JH (2005) Silicon micro probe card using porous silicon micro-machining technology. ETRI J 27:433–438. doi:10.4218/etrij.05.0104.0080

    Article  Google Scholar 

  • Kim BH, Kim HC, Choi SD, Chun K, Kim JB, Kim JH (2007) A robust MEMS probe card with vertical guide for a fine pitch test. J Micromech Microeng 17:1350–1359. doi:10.1088/0960-1317/17/7/018

    Article  Google Scholar 

  • Liao YS, Chen ST (2005) Precision fabrication of an arrayed micro metal probe by the laser-LIGA process. J Micromech Microeng 15:2433–2440. doi:10.1088/0960-1317/15/12/027

    Article  Google Scholar 

  • Lin L, Pisano AP (1999) Silicon-processed microneedles. IEEE J Microelectromech Syst 8:78–84. doi:10.1109/84.749406

    Article  Google Scholar 

  • Paik SJ, Lim JM, Jung I, Park YH, Byun S, Chung S, Chun K, Chang J, Cho DD (2003) A novel microneedle array integrated with a PDMS biochip for microfluid systems. In: IEEE Proceedings 12th Int. Conf. on solid state sensors, actuators and microsystems, pp 1446–1449

  • Park S, Kim B, Kim J, Paik S, Choi B-D, Jung I, Chun K, Cho DD (2002) A novel 3D process for single-crystal silicon micro-probe structures. J Micromech Microeng 12:650–654. doi:10.1088/0960-1317/12/5/321

    Article  Google Scholar 

  • Ryu J, Kim JH, Chu S, Lee S, Moon S (2006) Fabrication and mechanical characterization of micro electro mechanical system based vertical probe tips for micro pad measurements. Jpn J Appl Phys 45:9238–9243. doi:10.1143/JJAP.45.9238

    Article  Google Scholar 

  • Sato H, Yagyu D, Ito S, Shoji S (2006) Improved inclined multi-lithography using water as exposure medium and its 3D mixing microchannel application. Sens Actuators A 128:183–190. doi:10.1016/j.sna.2005.12.043

    Article  Google Scholar 

  • Sporck N (1997) A new probe card technology using compliant microspring. In: International test conference, pp 527–532

  • Yu H, Li B, Zhang X (2006) Fabrication of three-dimensional microstructures based on singled-layered SU-8 for lab-on-chip applications. Sens Actuators A 127:228–234. doi:10.1016/j.sna.2005.08.033

    Article  Google Scholar 

Download references

Acknowledgments

This work was supported by the National Science Council (series no. NSC96-2221-E-005-069-MY3) of Taiwan.

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Authors and Affiliations

  1. Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei, 106, Taiwan

    Tsung-Hung Lin & Ching-Kong Chao

  2. Institute of Precision Engineering, National Chung Hsing University, Taichung, 402, Taiwan

    Hsiharng Yang

  3. Materials and Electro-Optics Research Division, Chung-Shan Institute of Science and Technology, Tao-Yuan, 325, Taiwan

    Mau-Shiun Yeh

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  1. Tsung-Hung Lin
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  2. Hsiharng Yang
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  3. Ching-Kong Chao
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  4. Mau-Shiun Yeh
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Correspondence to Hsiharng Yang.

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Lin, TH., Yang, H., Chao, CK. et al. New fabrication method for micro-pyramidal vertical probe array for probe cards. Microsyst Technol 16, 1215–1220 (2010). https://doi.org/10.1007/s00542-009-0964-5

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  • DOI: https://doi.org/10.1007/s00542-009-0964-5

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