Skip to main content
SpringerLink
Log in

Active-head slider with piezoelectric actuator using shear-mode deformation

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

The active-head slider technology for hard disk drive is one of the most promising means to decrease flying height. This paper describes a piezoelectric flying height control slider which has a faster dynamic response compared with conventional active-head sliders. This slider can be also adapted to the conventional slider-fabrication process. PZT layer located near the magnetic head has shear mode deformation by applying electric voltage between the upper and lower electrodes when the flying height of magnetic head needs to be decreased or increased. We fabricated a prototype with single crystal Si substrate for feasibility study. Our evaluation of the prototype revealed that the piezoelectric constant of the shear mode deformation was 0.88 nm/V, and the dynamic response was 50 kHz. The shape of the air bearing surface was optimized by simulations using a robust design method. We found that the stroke was 8 nm for an applied voltage of 11 V if the flying height was 11 nm with no deformation in PZT.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13
Fig. 14
Fig. 15
Fig. 16
Fig. 17
Fig. 18
Fig. 19

Similar content being viewed by others

References

  • Gunderson NF, Schulz KJ, Bordson TA, Budde RA, Huha MA, Jiang M, Sluzewski DA, Wright JS, Berg LJ (2006) Component development and product integration of secondary piezoelectric actuator for disk drives. In: Joint conference on micromechatronics for information and precision equipment (S07-01)

  • Kurita M, Tsuchiyama R, Tokuyama M, Xu J, Yoshimura Y, Kohira H, Su L, Kato K (2003) Flying-height adjustment of a magnetic head slider with a piezoelectric micro-actuator. IEEE Trans Magn 39(5):2480–2482. doi:10.1109/TMAG.2003.816444

    Article  Google Scholar 

  • Kurita M, Shiramatsu T, Miyake K, Kato A, Soga M, Tanaka H, Saegusa S, Suk M (2006) Active flying-height control slider using MEMS thermal actuator. Microsyst Technol 12:369–375. doi:10.1007/s00542-006-0104-4

    Article  Google Scholar 

  • Kusumoto K (2007) “Technical handbook of piezoceramics. AIST (Japanese version)

  • Piezoelectric Ceramics (2006a) Fuji ceramics corporation website. http://www.fujicera.co.jp/product/e/01/index.html

  • Piezoelectric Ceramics (2006b) NEC/TOKIN corporation website. http://www.nec-tokin.com/english/product/dl_piezo.html

  • Sayer M, Judd BA, EI-Assal K, Prasad E (1981) Poling of piezoelectric ceramics. J Can Ceram Soc 50:91–310

    Google Scholar 

  • Shiramatsu T, Kurita M, Miyake K, Suk M, Ohki S, Tanaka H, Saegusa S (2006) Drive integration of active flying-height control slider with micro thermal actuator. IEEE Trans Magn 42(10):2513–2515. doi:10.1109/TMAG.2006.880564

    Article  Google Scholar 

  • Shiramatsu T, Atsumi T, Kurita M, Shimizu Y, Tanaka H (2008) Dynamically controlled thermal flying-height control slider, IEEE INTERMAG 2008, HO-05

  • Storage Research Consortium (2006) SRC 21st technical review meeting general report

  • Suzuki K, Kurita M (2003) A MEMS-based active-head slider for flying height control in magnetic recording. In: The international symposium on micro-mechanical engineering (A22-022)

  • Tagawa N, Kitamura K, Mori A (2003) Design and fabrication of MEMS-based active slider using double-layered composite PZT thin film in hard disk drives. IEEE Trans Magn 39(2):926–931. doi:10.1109/TMAG.2003.808950

    Article  Google Scholar 

  • Takagi H, Matsumoto S, Maeda R (2003) Corrosion resistant and highly reliable integration technology for MEMS devices. AIST (G-04)

  • Xu BX, Hu SB, Yuan HX, Zhang J, Chen YJ, Ji R, Miao XS, Chen JS, Chong TC (2006) Thermal effect of heated magnetic disk on the slider in heat-assisted magnetic recording. J Appl Phys 99:08N102

    Google Scholar 

  • Ishii K Design for manufacturability. Stanford University

  • Yeack-Scranton CE, Khanna VD, Etzold KF, Praino AP (1990) An Active slider for practical contact recording. IEEE Trans Magn 26(5):2478–2483. doi:10.1109/20.104770

    Article  Google Scholar 

Download references

Acknowledgments

The authors would like to thank Dr. K. Kusumoto at National Institute of Advanced Industrial Science and Technology for his helpful comments in PZT poling. The authors would also like to thank Dr. J. Xu and Dr. R. Tsuchiyama at Hitachi, Ltd, Central Research Laboratory for their helpful comments in ABS design.

Author information

Authors and Affiliations

  1. Central Research Laboratory, Hitachi, Ltd., 1, Kirihara-cho, Fujisawa, Kanagawa, 252-8588, Japan

    Irizo Naniwa

  2. Department of Micro-Nano Systems Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, Aichi, 464-8603, Japan

    Kazuo Sato

  3. Mechanical Engineering Research Laboratory, Hitachi, Ltd., 832-2, Horiguchi, Hitachinaka, Ibaraki, Japan

    Shigeo Nakamura & Kazutaka Sato

Authors
  1. Irizo Naniwa
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Kazuo Sato
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Shigeo Nakamura
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Kazutaka Sato
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Irizo Naniwa.

Additional information

ISPS’07—17th annual ASME conference on information storage and processing systems, June 18 and 19, 2007 at Santa Clara University, Santa Clara, CA, USA.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Naniwa, I., Sato, K., Nakamura, S. et al. Active-head slider with piezoelectric actuator using shear-mode deformation. Microsyst Technol 15, 1619–1627 (2009). https://doi.org/10.1007/s00542-009-0862-x

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-009-0862-x

Keywords

Search

Navigation