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Design of micromirror actuator by ionic polymer metal composites

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Abstract

Microactuators for micromirror system have found many applications in various areas including projection displays, optical switches, RF switches and so on. In this paper we demonstrated micromirror actuator using ionic polymer metal composites (IPMC) that is a suitable candidate, since it has many attractive qualities such as durability, aquatic, miniature and light-weighted. Specially, IPMC has extraordinary advantages which are simple bending motion for low driving voltage (1–2 V), low power consumption, and simple structure. The IPMC actuator is made of Nafion NE-1110 (Dupont Co, Ltd., 260 µm thick) layer and electrode (platinum) layers and driven by 1–4 V. The displacement measured vertically is 0.25 mm and tilting angle is 11.3°. The angular motion, which is more than 10°, is a good advantage in the field of display module. This paper shows that the IPMC actuator has enough possibility for other applications.

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Authors and Affiliations

  1. Center for Information Storage Device (CISD), Yonsei University, Shinchon-Dong, Seodaemoon-Ku, Seoul, 120-749, Korea

    Hyun Uk Yun, Chul Jin Kim, Sung Joo Kim, No Cheol Park, Hyunseok Yang & Young-Pil Park

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  1. Hyun Uk Yun
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  2. Chul Jin Kim
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  3. Sung Joo Kim
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  4. No Cheol Park
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  5. Hyunseok Yang
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  6. Young-Pil Park
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Correspondence to Hyunseok Yang.

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Yun, H.U., Kim, C.J., Kim, S.J. et al. Design of micromirror actuator by ionic polymer metal composites. Microsyst Technol 15, 1531–1538 (2009). https://doi.org/10.1007/s00542-009-0801-x

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  • DOI: https://doi.org/10.1007/s00542-009-0801-x

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