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Modeling and analysis of a 2-DOF bidirectional electro-thermal microactuator

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Abstract

In this paper, a four hot-arm U-shape electro-thermal actuator that can achieve bidirectional motion in two axes is introduced. By selectively applying voltage to different pairs of its four arms, the device can provide actuation in four directions starting from its rest position. It is shown that independent in-plane and out-of-plane motions can be obtained by tailoring the geometrical parameters of the system. The lumped model of the microactuator was developed using electro-thermal and thermo-mechanical analyses and validated using finite element simulations. The device has been fabricated using PolyMUMPs and experimental results are in good agreement with the theoretical predictions. Total in-plane deflections of 4.8 μm (2.4 μm in either direction) and upward out-of-plane deflections of 8.2 μm were achieved at 8 V of input voltage. The large achievable deflections and the higher degree-of-freedom of the proposed device compared to its counterparts, foresee its use in diverse MEMS applications.

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Authors and Affiliations

  1. Mechanical and Mechatronics Engineering, University of Waterloo, Waterloo, ON, N2L 3G1, Canada

    Caglar Elbuken, Nezih Topaloglu, Patricia M. Nieva, Mustafa Yavuz & Jan P. Huissoon

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  1. Caglar Elbuken
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  2. Nezih Topaloglu
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  3. Patricia M. Nieva
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  4. Mustafa Yavuz
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  5. Jan P. Huissoon
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Correspondence to Patricia M. Nieva.

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Elbuken, C., Topaloglu, N., Nieva, P.M. et al. Modeling and analysis of a 2-DOF bidirectional electro-thermal microactuator. Microsyst Technol 15, 713–722 (2009). https://doi.org/10.1007/s00542-009-0789-2

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  • DOI: https://doi.org/10.1007/s00542-009-0789-2

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