Microfluidics is an indispensable part of micro total analysis system (μ-TAS) and lab-on-a-chip analysis systems. While most of the work in this area has focused on MEMS based actuation with micropumps and microvalves, polymer based Paraffin actuator is an attractive alternative in terms of ease in fabrication and low cost. While we made previous attempts in fabricating polydimethylsiloxane (PDMS) based devices, it suffered a drawback of low flow rates in the microchannel due to adherence of PDMS to the channel substratum. In the current work, we focused on improvement of mechanical properties of the PDMS membrane by altering prepolymer to crosslinker ratio. We found that a ratio of 100:15 produced sufficient tensile strength to the membrane and also enhanced actuation characteristics of microvalve fabricated with it.
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Hsu Y-C, Chen T-Y (2007) Applying Taguchi methods for solvent-assisted PMMA bonding technique for static and dynamic μ-TAS devices. Biomed Microdevices 9(4):513–522. doi:10.1007/s10544-007-9059-1
Lee SJ, Lee SY (2004) Micro total analysis system (micro-TAS) in biotechnology. Appl Microbiol Biotechnol 64(3):289–299. doi:10.1007/s00253-003-1515-0
Yih TC, Wei C, Hammad B (2005) Modeling and characterization of a nanoliter drug-delivery MEMS micropump with circular bossed membrane. Nanomedicine 1(2):164–175
Yoo J-C, Moon M-C, Choi YJ, Kang CJ, Kim Y-S (2006a) A high performance microfluidic system integrated with the micropump and microvalve on the same substrate. Microelectronic Eng 83:1684–1687. doi:10.1016/j.mee.2006.01.202
Yoo J-C, Moon M-C, Kang CJ, Jeon D, Kim Y-S (2006b) Dynamic characteristics of the micro-fluidic systems actuated by thermopneumatic-method. Jpn J Appl Phys 45:519–552. doi:10.1143/JJAP.45.519
Zhang C, Xing D, Li Y (2007) Micropumps, microvalves, and micromixers within PCR microfluidic chips: advances and trends. Biotechnol Adv 25(5):483–514. doi:10.1016/j.biotechadv.2007.05.003
This work was supported by Grant No. ROA-2006-000-10274-0 from the National Research Laboratory Program of the Korean Science and Engineering Foundation.
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Ra, GS., Jha, S.K., Yoon, TS. et al. Improvement of dynamic characteristics of polydimethylsiloxane based microvalve. Microsyst Technol 15, 607–609 (2009). https://doi.org/10.1007/s00542-008-0743-8
- Microfluidic System
- Liquid Flow Rate
- Micro Electro Mechanical System
- PDMS Membrane