Abstract
Distributed MEMS transmission line (DMTL) phase shifter has been developed using planar inductors. The design consists of a coplanar waveguide line capacitively and inductively loaded by the periodic set of electrostatic force actuated microelectromechanical system switches as capacitors and inductors. By applying a single bias voltage on the line, the characteristic impedance can be changed, which in turn changes the phase velocity of the line and creates a true time delay phase shift. The governing equations for the impedance and loss are derived. The ABCD matrix is defined for a unit and multi-cell DMTL phase shifter to extract scattering parameters equations. The device containing 15 cells calculated, simulated, and fabricated. Fabricated results show that the device can be considered as a new type of the DMTL phase shifter with small size, higher phase shift and acceptable scattering parameters.
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Acknowldgments
This work has been supported by the Malaysian Ministry of Science, Technology and innovation under the project title “MEMS devices and sensing microstructures 03-02-02-0015-SR0003/07-01.”
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Afrang, S., Majlis, B.Y. Distributed transmission line phase shifter using MEMS switches and inductors. Microsyst Technol 14, 1173–1183 (2008). https://doi.org/10.1007/s00542-008-0637-9
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DOI: https://doi.org/10.1007/s00542-008-0637-9