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Extreme aspect ratio NiFe gear wheels for the production of commercially available Micro Harmonic Drive® gears

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Abstract

In a close collaboration the team of Micromotion, micro resist technology, BESSY, and LSU-CAMD have successfully mastered the challenges of LIGA production of ultra-precision microparts for Micro Harmonic Drive® gears. The complementary expertise ranging from design and application know-how to process research and technical support resulted in high quality LIGA microparts and superior Micro Harmonic Drive® gears taking advantages of the free 2D design capability and material choice. It is also an excellent example that through contributions from partners with different background and expertise LIGA precision parts can be produced with high quality and yield and for a market competitive price.

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Notes

  1. Web: Micromotion http://www.mikrogetriebe.de; MRT http://www.microresist.de/product.htm; MRT http://www.microresist.de/dl_poster_en.pdf; CAMD http://www.camd.lsu.edu.

References

  • Goettert J, Ahrens G, Bednarzik M, Degen R, Desta Y, Gruetzner G, Jian L, Loechel B, Ruhmann R, Yoonyoung J (2002) Cost Effective Fabrication of High Precision Microstructures Using a Direct-LIGA Approach. In: Proceedings of COMS 2002, Ypsilanti, Michigan, September

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Acknowledgments

The authors would like to thank all participants and contributors to this work, especially the co-workers from BESSY AZM and CAMD and the colleagues at micro resist technology GmbH and Micromotion GmbH.

This research was partially supported by the Bundesministerium für Forschung und Technologie and the VDI/VDE-IT of the Federal Republic of Germany as well as the Louisiana State funded operating of CAMD.

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Authors and Affiliations

  1. BESSY Anwenderzentrum für Mikrotechnik, Albert-Einstein-Str. 15, 12489, Berlin, Germany

    Bernd Loechel, Martin Bednarzik & Christoph Waberski

  2. CAMD, LSU, 6980 Jefferson Hwy, Baton Rouge, LA, 70806, USA

    Jost Goettert & Varshni Singh

  3. micro resist technology GmbH, Koepenicker Str. 325, 12555, Berlin, Germany

    Gabi Gruetzner, Gisela Ahrens & Rainer Engelke

  4. Micromotion GmbH, An der Fahrt 13, 55124, Mainz, Germany

    Reinhard Degen & Udo Kirsch

Authors
  1. Bernd Loechel
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  2. Jost Goettert
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  3. Gabi Gruetzner
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  4. Martin Bednarzik
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  5. Christoph Waberski
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  6. Gisela Ahrens
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  7. Rainer Engelke
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  8. Varshni Singh
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  9. Reinhard Degen
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  10. Udo Kirsch
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Corresponding author

Correspondence to Bernd Loechel.

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Loechel, B., Goettert, J., Gruetzner, G. et al. Extreme aspect ratio NiFe gear wheels for the production of commercially available Micro Harmonic Drive® gears. Microsyst Technol 14, 1675–1681 (2008). https://doi.org/10.1007/s00542-008-0607-2

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  • DOI: https://doi.org/10.1007/s00542-008-0607-2

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