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Shape controllable micro-nozzle fabrication

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Abstract

A novel fabrication method involving two-step sequential backside exposures utilizing Fraunhofer diffraction is developed in this work to overcome some of the limitations of the current micro-nozzle fabrication techniques in controlling the shape and the size of micro-nozzles. Shape and size of the fabricated micro-nozzles are compared with simulation results. Micro-nozzles with tip diameters varying from 0 to 158.1 μm and the base diameter varying from 167.2 to 360 μm are fabricated simultaneously side-by-side on the same substrate by varying the total exposure dosage from 3 to 6 J/cm2 utilizing multiple backside exposures through designed circular aperture and zone plate masks.

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Authors and Affiliations

  1. Department of Electrical and Computer Engineering, Louisiana State University, Baton Rouge, LA, 70803, USA

    KyungNam Kang & Pratul K. Ajmera

  2. Center for Advanced Microstructures and Devices, Louisiana State University, Baton Rouge, LA, 70806, USA

    Yoonyoung Jin & Jost Goettert

Authors
  1. KyungNam Kang
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  2. Yoonyoung Jin
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  3. Jost Goettert
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  4. Pratul K. Ajmera
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Correspondence to KyungNam Kang.

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Kang, K., Jin, Y., Goettert, J. et al. Shape controllable micro-nozzle fabrication. Microsyst Technol 14, 1641–1646 (2008). https://doi.org/10.1007/s00542-008-0604-5

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  • DOI: https://doi.org/10.1007/s00542-008-0604-5

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