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One MEMS design tool with maximal six design flows

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Abstract

This paper presents one MEMS design tool with a total six of design flows, which makes it possible that the MEMS designers choose the most suitable design flow for their specific devices. The design tool is divided into three levels and interconnected by six interfaces. The three levels are the lumped-element model based system level, finite element analysis based device level and process level, which cover nearly all modeling and simulation functions for MEMS design. The six interfaces are proposed to automatically transmit the design data between every two levels, thus the maximal six design flows could be realized. The interfaces take the netlist, solid model and layout as the data inlet and outlet for the system, device and process level respectively. The realization of these interfaces are presented and verified by design examples, which also proves that enough flexibility in the design flow can really increase the design efficiency.

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References

  • Antonsson EK (1995) Structured design methods for MEMS final report, A Workshop sponsored by the National Science Foundation, Pasadena, CA, http://www.design.caltech.edu/NSF_MEMS_Workshop/nsfmems.pdf

  • Fedder GK (2000) Top-down design of MEMS. In: Proceedings of the international conference on modeling and simulation of Microsystems, San Diego, CA, USA, pp 7–10

  • Senturia SD (1998) CAD Challenges for microsensors, microactuators, and microsystems. Proc IEEE 86(8):1611–1626

    Article  Google Scholar 

  • Zaman MH, Bart SF, Gilbert JR (1999) An environment for design and modeling electro-mechanical micro-systems. J Model Simul Microsyst 1(1):65–76

    Google Scholar 

  • Tang W.(1997) Overview of microelectromechanical systems and design processes.In: Proceedings of design automation conference, CA, USA, pp 670–673

  • Lorenz G, Remy Chevreuse S (2005) System and method for three-dimensional visualization and post-processing of a system model, US Patent 2005/0125750

  • Lorenz G, Remy Chevreuse S, Kennedy CJ (2005) System and method for automatic mesh generation from a system-level MEMS design, US Patent 2005/006630

  • Ananthakrishnan V (2000) Part-to-Art: 0Basis for a Systematic Geometry Design Tool for Surface Micromachined MEMS, Master thesis of University of Toledo, Dec

  • Lang M, David D, Glesner M (1997) Automatic transfer of parametric FEM models into CAD-layout formats for top-down design of microsystems. In: Proceedings Of European Design & Test Conferences, Paris, France, pp 200–204

  • Xianglian L, Weizheng Y, Zijian Y, Jun L(2006) A macro-model extraction method based on finite element analysis. In: Proceedings Of the Asia-Pacific Conference of Transducers and Micro-Nano Technology, Singapore

  • Golub GH, Loan CFV (1996) Matrix computations. The Johns Hopkins University Press, Baltimore

    Google Scholar 

  • Baidya B, Gupta SK, Mukherjee T (1999) MEMS component extraction. In: Proceedings of International Conference on Modeling and Simulation of Microsystems, pp 143–146

  • Baidya B, Gupta SK, Mukherjee T (2002) An extraction-based verification methodology for MEMS. J Microelectromech Syst 11(1):2–11

    Article  Google Scholar 

  • Osterberg PM, Senturia SD (1995) MemBuilder: an automated 3D solid model construction program for microelectromechanical structures. Sens Actuators Tech 2:21–24

    Google Scholar 

  • DeVoe D, Green SB, Jump JM (1998) Automated solid model extraction for MEMS visualization, In:Proceedings of International Conference on Modeling and Simulation of Microsystems, pp 292–297

  • Chang H, Yuan W, Xie J, Jiang Q, Zhang C (2006) One mechanically decoupled Z-axis gyroscope. In:Proceedings of IEEE NEMS, Zhuhai, China, pp 373–376

Download references

Acknowledgements

The authors gratefully acknowledge Chinese National Science Foundation’s financial support (Contract No. 50505038) and Chinese Hi-Tech Research and Development Program’s financial support (Contract No.2006AA04Z306). The English Corrections from Lewis Thomas and Ge Zhang from Infineon are greatly appreciated. And Saber, L-Edit, Ansys is the product and trademark of Synopsys, Tanner and Ansys Inc respectively.

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Authors and Affiliations

  1. Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi’an, 710072, China

    Honglong Chang, Jinghui Xu, Jianbing Xie, Chengliang Zhang, Zijian Yan & Weizheng Yuan

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  1. Honglong Chang
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  2. Jinghui Xu
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  3. Jianbing Xie
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  4. Chengliang Zhang
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  5. Zijian Yan
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  6. Weizheng Yuan
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Correspondence to Honglong Chang or Weizheng Yuan.

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Chang, H., Xu, J., Xie, J. et al. One MEMS design tool with maximal six design flows. Microsyst Technol 14, 775–785 (2008). https://doi.org/10.1007/s00542-007-0546-3

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  • DOI: https://doi.org/10.1007/s00542-007-0546-3

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