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Modeling of large area hot embossing

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Abstract

Today, hot embossing and injection molding belong to the established plastic molding processes in microengineering. Based on experimental findings, a variety of microstructures have been replicated so far using the processes. However, with increasing requirements regarding the embossing surface and the simultaneous decrease of the structure size down into the nanorange, increasing know-how is needed to adapt hot embossing to industrial standards. To reach this objective, a German–Canadian cooperation project has been launched to study hot embossing theoretically by a process simulation and experimentally. The present publication shall report about the first results of the simulation—the modeling and simulation of large area replication based on an eight in. microstructured mold.

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Acknowledgments

This work has been funded by the NRC Helmholtz Science and Technology Fund and the German Ministry of Education and Research, BMBF (project 01SF0201/7).

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Authors and Affiliations

  1. Forschungszentrum Karlsruhe, Institut für Mikrostrukturtechnik, Postfach 36 40, 76021, Karlsruhe, Germany

    M. Worgull & M. Heckele

  2. Industrial Materials Institute, National Research Council of Canada, Boucherville, Canada

    K. K. Kabanemi, J.-P. Marcotte & J.-F. Hétu

Authors
  1. M. Worgull
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  2. K. K. Kabanemi
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  3. J.-P. Marcotte
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  4. J.-F. Hétu
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  5. M. Heckele
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Correspondence to M. Worgull.

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Worgull, M., Kabanemi, K.K., Marcotte, JP. et al. Modeling of large area hot embossing. Microsyst Technol 14, 1061–1066 (2008). https://doi.org/10.1007/s00542-007-0493-z

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  • DOI: https://doi.org/10.1007/s00542-007-0493-z

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