Abstract
Modeling, optimization and performance of on-chip solenoid inductors is presented. MATLAB is used to get the π-equivalent circuit model parameters. The effects of the geometrical parameters on the inductance and quality factor (Q-factor) are different. Normally, the performance of the inductors can be improved by increasing the coil turns in a way and increasing the length of the conductor, but both of them will occupy more chip area, which is not good for the minimization of the on-chip system. It is desirable to improve the performance of inductor by increasing the height of the via. Of the three types of fabricated inductors covering the same area, the inductors with the height of via 15, 30 and 45 μm have high performance. The self-resonant frequency is up to 10 GHz. The inductances and Q-factors at peak-Q frequency (about 5.8 GHz) are 1.16, 1.35, 1.78 nH and 21.9, 27, 38, respectively.
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Acknowledgments
This work was supported by Shanghai-Applied Materials Research and Development Fund (No.0515), National High Technology Research and Development Program (No. 2006AA03Z301), Nanotechnology Program of Shanghai Science & Technology Committee (No. 0652 nm004), and Non-silicon Precision Micromachining and Microfabrication Technology (D2320060098).
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Fang, DM., Zhou, Y., Jing, XM. et al. Modeling, optimization and performance of high-Q MEMS solenoid inductors. Microsyst Technol 14, 185–191 (2008). https://doi.org/10.1007/s00542-007-0421-2
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DOI: https://doi.org/10.1007/s00542-007-0421-2