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The microcavity-based micro-heater: an optimum design for micro-heaters

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Abstract

Thermal management is an integral part of micro-heater design. In this paper, the application of a microcavity concept is introduced. The thermal behavior of the proposed novel structure is also numerically investigated in this research to indicate its capability to improve the micro-heaters efficiency and eliminate the common problems of membrane-type heaters. The numerical simulation of the heater structure shows that by using this approach, not only a considerable decrease in power consumption of micro-heaters is attained but also the bubble nucleation point in micro-pumps/micro-injectors can exactly be controlled. As a result, the lengthening of rectangular micro-cavities can contribute to improving heater operation to a greater extent than thickening them. Having a more simple manufacturing process, micro-heater yet has very similar thermal operation characteristics in comparison with bonded heaters.

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Authors and Affiliations

  1. Department of Mechanical Engineering, Faculty of Engineering, Urmia University, 1.5 km Sero Road, Urmia, 57169-33111, Iran

    P. Kahroba, I. Mirzaee & P. Sharifi

  2. Department of Design and Technology, Anglia Ruskin University, UK Bishop Hall Lane, CM1 1SQ, Chelmsford, UK

    H. Shirvani

Authors
  1. P. Kahroba
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  2. I. Mirzaee
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  3. P. Sharifi
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  4. H. Shirvani
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Correspondence to P. Kahroba.

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Kahroba, P., Mirzaee, I., Sharifi, P. et al. The microcavity-based micro-heater: an optimum design for micro-heaters. Microsyst Technol 14, 705–710 (2008). https://doi.org/10.1007/s00542-007-0418-x

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  • DOI: https://doi.org/10.1007/s00542-007-0418-x

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