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Shen, I.Y., Saegusa, S. 2006 ASME-ISPS/JSME-IIP joint conference on micromechatronics for information and precision equipment, Santa Clara, California, USA. Microsyst Technol 13, 731–732 (2007). https://doi.org/10.1007/s00542-007-0399-9
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DOI: https://doi.org/10.1007/s00542-007-0399-9