Abstract
We fabricate a wavelength-selective variable-reflection filter driven by four bimorph actuators to realize out-of-plane motion in parallel. The actuators are designed using a simple calculation model for controlling position of the filter anywhere within air gap fabricated in between the filter and silicon substrate. In order to keep a 260-nm thick filter flat, the filter and actuators are stabilized by torsion bars each with a width and length of 3 and 10 μm, respectively. Displacement, flatness and surface roughness of the fabricated filter are measured. As a result, 10.1 μm of the displacement is obtained at 24.7 mW input power using a 70-μm length actuator. Besides, the filter with a flat surface and roughness of 0.08 μm is obtained. Reflectivity of the filter consisting of 800-nm period grating is also measured.
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References
Ford JE, Walker JA (1998) Dynamic spectral power equalization using micro-opto-mechanics. IEEE Photon Technol Lett 10:1440–1442
Graff JW, Schubert EF (2000) Flat free-standing silicon diaphragms using silicon-on-insulator wafers. Sens Actuators 84:276–279
Greywall DS, Busch PA, Pardo F, Carr DW, Bogart G, Soh HT (2003) Crystalline silicon tilting mirrors for optical cross-connect switches. J Microelectromech Syst 12:708–712
Kanamori Y, Kitani T, Hane K (2004) Wavelength selective variable reflection filters using movable guided mode resonance gratings. In: Proceedings of IEEE/LEOS international conference on optical MEMS and their applications, optical MEMS 2004, Takamatsu, August 22–26, pp 204–205
Kanamori Y, Kitani T, Hane K (2006) Guided-mode resonant grating filter fabricated on silicon-on-insulator substrate. Jpn J Appl Phys 45:1883–1885
Mateus CFR, Huang MCY, Chen L, Chang-Hasnain CJ, Suzuki Y (2004) Broad-band mirror (1.12–1.62 μm) using a subwavelength grating. IEEE Photon Technol Lett 16:1676–1678
Mizutani A, Kikuta H, Iwata K (2003) Wave localization of doubly periodic guided-mode resonant grating filters. Opt Rev 10:13–18
Packer O, Diller LC, Verweij J, Lee BB, Pokorny J, Williams DR, Dacey DM, Brainard DH (2001) Characterization and use of a digital light projector for vision research. Vision Res 41:427–439
Riethmüller W, Benecke W (1988) Thermally excited silicon microactuators. IEEE Trans Electron Devices 35:758–763
Spisser A, Ledantec R, Seassal C, Leclercq JL, Benyattou T, Rondi D, Blondeau R, Guillot G, Viktorovitch P (1998) Highly selective and widely tunable 1.55-μm InP/air-gap micromachined Fabry–Perot filter for optical communications. IEEE Photon Technol Lett 10:1259–1261
Yee Y, Nam HJ, Lee SH, Bu JU, Lee JW (2001) PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage. Sens Actuators A 89:166–173
Acknowledgments
Part of this work was supported by the Industrial Technology Research Grant Program from the New Energy and Industrial Technology Development Organization (NEDO) of Japan, and performed at the Venture Business Laboratory in Tohoku University, Japan.
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Kanamori, Y., Kitani, T. & Hane, K. Out-of-plane motion of 260-nm thick guided-mode resonant grating filter controlled by four micro-thermal actuators. Microsyst Technol 13, 867–872 (2007). https://doi.org/10.1007/s00542-006-0286-9
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DOI: https://doi.org/10.1007/s00542-006-0286-9