Abstract
The following article presents two approaches for the observation and control of assembly processes for hybrid micro systems. To meet the demands of a production of huge quantities of pieces, the control of the assembly of a micro mixing by image processing is presented. Finally a flexible fiber based sensor for handling devices is presented.
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Acknowledgements
The authors gratefully acknowledge the financial support of the Deutsche Forschungsgemeinschaft (DFG) within the Collaborative Research Center (SFB) 440 „Assembly of hybrid microsystems”.
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Schmitt, R., Driessen, S. & Engelmann, B. Controlling the assembly of micro systems by image processing. Microsyst Technol 12, 640–645 (2006). https://doi.org/10.1007/s00542-006-0097-z
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DOI: https://doi.org/10.1007/s00542-006-0097-z