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Development of an optical stylus displacement sensor for surface profiling instruments

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Abstract

The main cause of irrational results from measurements made with optical stylus instruments is speckle noise in the reflected light. To reduce or eliminate speckle noise, we developed a new optical stylus profiling system consisting of a displacement measuring part using a knife-edge and a speckle noise measurement part. Using this new system, we measured profiles of machined materials. The results show that the new system can eliminate speckle noise and can achieve a level of measurement accuracy as high as that of a contact stylus instrument.

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Authors and Affiliations

  1. Tokyo Metropolitan College of Technology, 1-10-40 Higashi-Ohi, Shinagawa-ku, Tokyo, 140-0011, Japan

    Hiroya Fukatsu

  2. Department of Mechanical Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka-cho, Nagaoka-shi, Niigata, 940-2188, Japan

    Kazuhisa Yanagi

Authors
  1. Hiroya Fukatsu
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  2. Kazuhisa Yanagi
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Corresponding author

Correspondence to Hiroya Fukatsu.

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Fukatsu, H., Yanagi, K. Development of an optical stylus displacement sensor for surface profiling instruments. Microsyst Technol 11, 582–589 (2005). https://doi.org/10.1007/s00542-005-0558-9

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  • DOI: https://doi.org/10.1007/s00542-005-0558-9

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