Abstract
MicroElectroMechanical Systems (MEMS) are very tiny mechanical devices (on the order of 10–1000 μm) such as sensors, valves, gears, and actuators fabricated on the surface of silicon wafers. These microstructures are created using the same photolithographic processes used in manufacturing other semiconductor devices. Therefore, it is possible to integrate several semiconductor devices (e.g., processors and memory) directly with the nonvolatile storage device. The hierarchy gap between RAM and disks is creating a performance bottleneck in computer systems. MEMS-based storage can improve computer systems performance and fill significant assess time, power dissipation, mass, and cost gaps between RAM and disks. MEMS-based storage is very young technology so there are many possibilities for designing, modeling, and performance. We focus on the system-level performance characteristics. This paper explores control systems with quadratic optimal control and observed-state feedback control for MEMS-based storage device. A closed-loop control system actively damps the oscillations using the actuators and reduces seek time by reducing settling time. Optimizations of the control loop can provide better I/O performance. Accurate model of system components is important for analysis of system performance because these devices do not exist yet. At the beginning of development, our control models may provide reasonable feedback and design trade-offs to both hardware and software designers.
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Jeon, H., Grunwald, D. Design of servo control systems with quadratic optimal control and observed-state feedback control for mems-based storage device. Microsyst Technol 11, 1005–1012 (2005). https://doi.org/10.1007/s00542-005-0528-2
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DOI: https://doi.org/10.1007/s00542-005-0528-2