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Mitsuya, Y., Suk, M. JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment, Yokohama, 2003. Microsyst Technol 11, 557–558 (2005). https://doi.org/10.1007/s00542-005-0496-6
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DOI: https://doi.org/10.1007/s00542-005-0496-6