Abstract
We have developed an ink-jet system which allows arrangements of dots with a submicron minimum size. Using an ultra-fine silver paste, we achieved the direct print of metallic wires of only a few micrometers in width without any pre-patterning treatment of the substrate, hydrophobic/hydrophilic patterning, bank patterning etc. We also propose an application, such as direct printing of ultra-fine redistribution wiring for a build-up board and/or package. Since all of these processes can be carried out at atmospheric pressure on the desktop without special treatment of the substrate. The direct fabrication process using ink-jet printing can be expected to be a powerful tool for both nanotechnology research and applications such as micro electronics, etc.
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Acknowledgements
The author gratefully acknowledge Dr. T. Iijima at AIST for the preparation of sol-gel solution of ceramics, D. Ito, M. Ueda, Dr. N. Hata and K. Oyama in Harima Chemical Inc. for the supply of silver NanoPasteTM and Mrs. H. Sagisaka in AIST for experimental assistance.
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Murata, K., Matsumoto, J., Tezuka, A. et al. Super-fine ink-jet printing: toward the minimal manufacturing system. Microsyst Technol 12, 2–7 (2005). https://doi.org/10.1007/s00542-005-0023-9
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DOI: https://doi.org/10.1007/s00542-005-0023-9