Abstract
We present an optical tunable Fabry-Perot micromachined interferometer. The device is monolithically integrated with a p+-n photodiode on a silicon substrate, providing an adequate positioning of the photonic and microoptical components. The Fabry-Perot micro-interferometer consists of two parallel mirrors and lets the light with a particular wavelength pass through. The wavelength depends on the gap between the mirrors. We can change the gap of the micro-mechanical Fabry-Perot interferometer by applying a voltage to the mirrors, an electrostatic force inducing an attraction between the substrate and the top mirror. A simulation of the mechanical behavior was performed based on finite elements, using CoventorWare software. The method included an electro-mechanical simulation for a square parallel plate actuation with four connecting beams. The finite elements method (FEM) simulations of the device (the Fabry-Perot tunable filter) are performed for optimizing the design parameters in order to model the overall system performance, both the steady-state behavior and dynamic response.
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Calaza C, Fonseca L, Moreno M, Marco S, Cane C, Gracia I (2001) Modeling and simulation of an electrostatically actuated surface-micromachined tunable Fabry-Perot interferometer for the medium IR spectral range. In: Proceedings of the EuroSimE. pp 241–247
Han J, Kim J, Kim TS, Kim JS (2000) Performance of Fabry-Perot microcavity structures with corrugated diaphragms, Sens Actuators A 79:166–172
Jerman JH, Clift DJ, Mallisnson SR (1990) A miniature Fabry-Perot interferometer with a corrugated diaphragm support, Technical Digest IEEE Solid State Sensor and Actuator Workshop, Hilton Head, 140–144
Müller R, Manea E, Kusko M (2001) Thin membranes obtained by surface micromachining-preliminary study for a Fabry-Perot interferometer. In: Proceeding of the CAS 2001, Sinaia, Romania, pp 193–196
Tibeica C, Müller R, Cristea D, Pons P (2003) Mechanical behavior simulation of an electrostatically actuated Fabry-Perot cavity. In: Proceedings of the 17th European conference on solid-state transducers—eurosensors XVII, Guimaraes, Portugal, pp 21–24
Tran ATTD, Lo YH, Zhu ZH, Haronian D, Mozdy E (1996) Surface micromachined Fabry-Perot Tunable Filter, IEEE Photonics Technol Lett 8(3):393–395
Acknowledgements
This work was supported by the Romanian Ministry of Education Research and Youth, national program Matnantech “New Materials, Micro and Nano-technologies” and by LAAS CNRS in the frame of the Brancusi Project.
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Müller, R., Cristea, D., Tibeica, C. et al. Tunable Fabry-Perot surface micromachined interferometer-experiments and modeling. Microsyst Technol 12, 91–97 (2005). https://doi.org/10.1007/s00542-005-0021-y
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DOI: https://doi.org/10.1007/s00542-005-0021-y