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Integrated electromagnetic microactuators with a large driving force

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Abstract

This paper describes a high power electromagnetic microactuator fabrication method that combines the hard magnetic Fe/Pt process, Ni/Fe permalloy magnetic circuit design, bulk micromachining, and excimer laser ablation. The hard magnetic material Fe/Pt is deposited under low temperature less than 350°C by sputter onto a suspension diaphragm to produce a perpendicular magnetic anisotropic field. The magnetic circuit with closed loop design is applied to concentrate the magnetic flux and increase the magnetic force. The magnetic field induced by the planar coil and Ni/Fe permalloy enhances the interaction with Fe/Pt to induce attractive and repulsive displacement, provide large output force, and operate at high frequency. This high power electromagnetic microactuator is demonstrated with minimum dimensions with a magnetic force two times greater than conventional magnetic micro-actuators.

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Acknowledgements

This work was supported by the National Science Council (series no. NSC92-2212-E-005-005) and the Ministry of Economic Affairs of Taiwan, R.O.C. Thanks are due to the Mechanical Industry Research Laboratories of the Industrial Technology Research Institute Technology for supporting this study.

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Authors and Affiliations

  1. Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-Sen University, Kaohsiung, 804, Taiwan

    C.-T. Pan

  2. Institute of Precision Engineering, National Chung Hsing University, Taichung, 402, Taiwan

    H. Yang

  3. Mechanical Industry Research Laboratories, Industrial Technology Research Institute, Hsinchu, 310, Taiwan

    M.-C. Chou & S.-C. Shen

Authors
  1. C.-T. Pan
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  2. H. Yang
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  3. M.-C. Chou
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  4. S.-C. Shen
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Corresponding author

Correspondence to H. Yang.

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Pan, CT., Yang, H., Chou, MC. et al. Integrated electromagnetic microactuators with a large driving force. Microsyst Technol 12, 173–179 (2005). https://doi.org/10.1007/s00542-005-0013-y

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  • DOI: https://doi.org/10.1007/s00542-005-0013-y

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