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Fabrication and optimization of bimorph micro probes for the measurement of individual biocells

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Abstract

This paper deals with a novel structure for single-cell characterization which makes use of bimorph thermal actuators combined with electrical sensor device and integrated micro channel. The goal of this device is to capture and characterize individual biocells or micro particles. After analysis of actuation by numerical modeling and simulation, practical fabrication of prototype probes is realized. Finally, we optimize the dimension of cantilevers and integrated parallel probe systems with microfluidic channels.

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References

  • Greulich KO, Pilarczyk G, Hoffmann A, Meyer Zu horste G, Schafer B, Uhl V, Monajembashi S (2000) Micromanipulation by laser microbeam and optical tweezers; from plant cells to single molecules. J Microsc 198:182–187, and references therein

    Google Scholar 

  • Le Pioufle B, Surbled P, Nagai H, Murakami Y, Chun KS, Tamiya E, Fujita H (2000) Living cells captured on a bio-microsystem devoted to DNA injection. Mater Sci Eng C12:77–81

    Article  Google Scholar 

  • Huang Y, Chen N, Borninski J, Rubinsky B (2003) A novel microfluidic cell-chip for single cell analysis and manipulation. MEMS’03, pp403–406

  • Balaban NQ, Schwarz US, Riveline D, Goichberg P, Tzur G, Sabanay I, Mahalu D, Safran S, Bershadsky A, Addadi L, Geiger B (2001) Force and focal adhesion assembly: a close relationship studied using elastic micropatterned substrates. Nat Cell Biol 3:466–472

    Article  PubMed  Google Scholar 

  • Jager EWH, Inganas O, Lundstrom I (2000) Microrobots for micrometer-size objects in aqueous media: potential tools for single-cell manipulation. Science 288:2335–2338

    Article  PubMed  Google Scholar 

  • Kim BJ, Collard D, Lagouge M, Conseil F, Legrand B, Buchaillot L (2003) Thermally actuated probe arrays for manipulation and characterization of individual bio-cell. In: Proceedings of the 12th international conference on solid-state sensors, actuators and microsystems (Transducer’03), vol 2. pp1255–1258

  • Young WC (1989) Roark’s formulas for stress and strain. McGraw-Hill, New York, pp 162–117

    Google Scholar 

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Acknowledgements

The author would like to thank all members of silicon microsystem group and cleanroom staff at IIS, University of Tokyo and IEMN, CNRS. Many thanks are given to Dr. Jeongjin Kang of Korea Institute of Industrial Technology for his fruitful discussion and advice about simulation.

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Authors and Affiliations

  1. CIRMM, Institute of Industrial Science, University of Tokyo 4-6-1, Komaba, Meguro-ku, Tokyo, 153-8505, Japan

    Y. H. Cho, D. Collard & B. J. Kim

  2. Institut d’Electronique de Microélectronique et de Nanotechnologie, UMR, CNRS, 8520, France

    L. Buchaillot & F. Conseil

Authors
  1. Y. H. Cho
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  2. D. Collard
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  3. L. Buchaillot
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  4. F. Conseil
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  5. B. J. Kim
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Corresponding author

Correspondence to B. J. Kim.

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Cho, Y.H., Collard, D., Buchaillot, L. et al. Fabrication and optimization of bimorph micro probes for the measurement of individual biocells. Microsyst Technol 12, 30–37 (2005). https://doi.org/10.1007/s00542-005-0010-1

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  • DOI: https://doi.org/10.1007/s00542-005-0010-1

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