Skip to main content
SpringerLink
Log in

Transient thermal characterisation of hot plates

  • Technical paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

    We’re sorry, something doesn't seem to be working properly.

    Please try refreshing the page. If that doesn't work, please contact support so we can address the problem.

Abstract

The paper will present the methodology and the results of measuring and simulating the thermal transient behaviour of micro hotplates. The investigated devices were designed for integrated gas sensors of calorimetric operation principle, e.g. micro-pellistors, heat conductivity type sensors or mass flow meters. They consist of a platinum heater filament embedded in silicon-nitride membranes that can be used both for heating and temperature sensing.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11

Similar content being viewed by others

References

  1. Dücsö Cs., Ádám M., Fürjes P., Hirschfelder M., Kulinyi S., Bársony I. (2002) Explosion-proof monitoring of hydrocarbons by micropellistor. In: Proceedings of Eurosensors XVI, Prague (2002), pp 605–606, Sensors Actuators B 95: 188–193

  2. Fürjes P., Dücsö Cs., Ádám M., Morrissey A., Bársony I. (2002) “Materials and processing for realisation of micro-hotplates operated at elevated temperature. Journal of Micromech Microeng 12: 425–429

    Article  Google Scholar 

  3. SUNRED Manual, MicReD Ltd. Budapest

  4. T3Ster Manual, MicReD Ltd. Budapest

  5. Székely V. (1991) On the representation of infinite length distributed RC one-ports. IEEE Trans Circuits Syst 38:711–719

    Article  Google Scholar 

  6. Rencz M. (2001) Dynamic temperature analysis of electronic systems. Future Circuits Inte, ISSN 1368-4361: 51–54

    Google Scholar 

  7. Rencz M., Székely V., Poppe A., Farkas G., Courtois B. (2001) New methods and supporting tools for the thermal transient testing of packages. APACK 2001, Singapore, pp 5–7

    Google Scholar 

  8. Fürjes P., Dücsö Cs., Ádám M. (2003) Jürgen zettner and I. Bársony. Thermal characterisation of micro-hotplates applied in Sensor Structures. Proceedings of Eurotherm 2003, pp 59–60, Reims

Download references

Acknowledgements

This study was partly supported by the EU FW5 project SAFEGAS and by the grant T 033094 of the Hungarian Scientific Research Found OTKA.

Author information

Authors and Affiliations

  1. Budapest University of Technology and Economics, Budapest, Hungary

    Gy. Bognár & V. Székely

  2. Research Institute for Technical Physics and Materials Science, Budapest, Hungary

    P. Fürjes

  3. MicReD Ltd., Budapest, Hungary

    M. Rencz

Authors
  1. Gy. Bognár
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. P. Fürjes
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. V. Székely
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. M. Rencz
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Gy. Bognár.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Bognár, G., Fürjes, P., Székely, V. et al. Transient thermal characterisation of hot plates. Microsyst Technol 12, 154–159 (2005). https://doi.org/10.1007/s00542-005-0002-1

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-005-0002-1

Keywords

Search

Navigation