Abstract
A new analysis on the angular-rate bandwidth characteristics of a vibrating microgyroscope is proposed. Employing a dynamic model for a vibrating microgyroscope, the frequency response of the vibrating microgyroscope is analyzed with respect to an input angular rate. A microgyroscope, in which an inertial mass vibrates on a substrate plane, is designed and fabricated by surface micromachining technology using polysilicon structures on an insulation layer. The fabricated microgyroscope was operated in a vacuum environment of 100 mtorr, and showed the sensitivity of 5 mV s/° with the noise level of 1 mV. Bandwidth characteristics of the microgyroscpes were also investigated by comparison with the simulation on the bandwidth model, and the validity of the proposed dynamic model was evaluated.
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Hong, Y., Kim, S. & Lee, J. Modeling of angular-rate bandwidth for a vibrating microgyroscope. Microsystem Technologies 9, 441–448 (2003). https://doi.org/10.1007/s00542-002-0290-7
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DOI: https://doi.org/10.1007/s00542-002-0290-7