Abstract
In this work we constructed an injection press molding system with a mold-core extrusion mechanism and a small sensor assembly for effectively duplicating microstructures to the mold products. The mold-core extrusion mechanism is driven by a piezo element to apply force on important area with microstructures. For example, after injection it increases the cavity pressure from 20 to 34 MPa. Small sensors consist of the pressure, displacement, and heat flux sensor assemblies, arranged around the small cavity. The signals showed us the physical phenomena inside the mold and may be further used as control signal. In order to evaluate this injection press molding system, we formed micro triangular grooves of pitch 1 μm and angle 140°. The mold-core extrusion gave better diffraction intensity by several percents.
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Received: 16 May 2001/Accepted: 24 July 2001
The authors would like to thank FANUC Ltd. for cutting the triangular grooves on the mold-core.
This paper was presented at the Conference of Micro System Technologies 2001 in March 2001.
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Yan, C., Nakao, M., Go, T. et al. Injection molding for microstructures controlling mold-core extrusion and cavity heat-flux. Microsystem Technologies 9, 188–191 (2003). https://doi.org/10.1007/s00542-002-0262-y
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DOI: https://doi.org/10.1007/s00542-002-0262-y