Abstract
The analysis of the measurement uncertainty of piezoresistive sensors should be performed according to the ISO “Guide to the Expression of Uncertainty in Measurement” (GUM) and the requirement document EAL-R2 of the `European co-operation for Accreditation of Laboratories'. In this work, the derivation of a model of the physical relationships between quantities in the respective measurement is demonstrated for the case of a piezoresistive sensor. The model is used to evaluate the uncertainty in measurement of semiconductor piezoresistive sensors.
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Received: 29 June 2001/Accepted: 25 July 2001
This work was supported by the Centre of Postgraduate Studies “Sensorics” at Dresden University of Technology funded by the German Research Council (DFG).
This paper was presented at the Conference of Micro System Technologies 2001 in March 2001.
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Hoa, P., Gerlach, G. & Suchaneck, G. Uncertainty in measurement of semiconductor piezoresistive sensors. Microsystem Technologies 9, 210–214 (2003). https://doi.org/10.1007/s00542-002-0239-x
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DOI: https://doi.org/10.1007/s00542-002-0239-x