Abstract
We report on the versatile application potential of SU8 photoepoxy for movable micromechanical components. Its outstanding resolution, aspect ratio, and attainable film thicknesses enable the design of structures that allow lateral mechanical interaction of voluminous micro parts. We additionally developed a sacrificial layer process enabling the release of in situ fabricated micro parts as well as large area parts used for capping and packaging. The applicability of this technology is demonstrated on gearwheels in a turbine configuration, a micro fluidic channel with integrated check valve, and an advanced multilayer capping technology with precise feather key fit.
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Received: 10 August 2000/Accepted: 24 September 2001
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Seidemann, V., Rabe, J., Feldmann, M. et al. SU8-micromechanical structures with in situ fabricated movable parts. Microsystem Technologies 8, 348–350 (2002). https://doi.org/10.1007/s00542-002-0171-0
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DOI: https://doi.org/10.1007/s00542-002-0171-0