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Scale-dependent analysis of sliding wear between the bushing and the ground plane in micromotors

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Abstract

Among the problems in microelectromechanical systems, friction and wear are the most concerned ones. In this paper, a model to predict the sliding wear between the rotor bushing and the substrate plane in a variable capacitance micromotor is presented. The model is based on the Archard’s wear law and takes into account the scale effects, including the effects of such surface forces as meniscus force due to humidity and the electrostatic force as a result of the capacitance coupling between the rotor and substrate, as well as the scale effects of material properties, which become scale dependent in microscale. The wear process and durability of the hemispherical bushing are investigated and discussed. Simulation results show that they are largely affected by these effects, and it is indicated that sufficient attention should be taken in the design and fabrication of micromotors on the scaling effects.

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References

  1. Williams, J.A.: Friction and wear of rotating pivots in MEMS and other small scale devices. Wear 251(1–12), 965–972 (2001)

    Article  Google Scholar 

  2. Suzuki, S., et al: Friction and wear studies on lubricants and materials applicable to MEMS. Proc. IEEE microElectro Mech. Syst. 143–147 (1991)

  3. Beerschwinger, U. et al.: A study of wear on MEMS contact morphologies. J. Micromech. Microeng. 4(3), 95–105 (1994)

    Article  Google Scholar 

  4. Bhushan, B., Nosonovsky, M.: Scale effects in friction using strain gradient plasticity and dislocation-assisted sliding (microslip). Acta Mater. 51(14), 4331–4345 (2003)

    Article  Google Scholar 

  5. Bhushan, B., Nosonovsky, M.: Scale effects in dry and wet friction, wear, and interface temperature. Nanotechnology 15(7), 749–761 (2004)

    Article  Google Scholar 

  6. Tambe, N.S., Bhushan, B.: Scale dependence of micro/nano-friction and adhesion of MEMS/NEMS materials, coatings and lubricants. Nanotechnology 15(11), 1561–1570 (2004)

    Article  Google Scholar 

  7. Zhang, W.M., Meng, G.: Friction and wear study of the hemispherical rotor bushing in a variable capacitance micromotor. Microsyst. Technol. 12(4), 283–292 (2006)

    Article  Google Scholar 

  8. Zhang, W.M., Meng, G.: Contact dynamics between the rotor and bearing hub in an electrostatic micromotor. Microsyst. Technol. 11(6), 438–443 (2005)

    Article  Google Scholar 

  9. Bart, S.F. et al.: Electric micromotor dynamics. Electron Device IEEE Trans. 39(3), 566 (1992)

    Article  Google Scholar 

  10. Kapoor, A., Johnson, K.L.: Plastic ratchetting as a mechanism of metallic wear. Proc. Math. Phys. Sci. 445(1924), 367–384 (1994)

    Article  Google Scholar 

  11. Yan, W., O’Dowd, N.P., Busso, E.P.: Numerical study of sliding wear caused by a loaded pin on a rotating disc. J. Mech. Phys. Solids 50(3), 449–470 (2002)

    Article  MATH  Google Scholar 

  12. Peerlings, R.H.J. et al.: Gradient-enhanced damage modelling of high-cycle fatigue. Int. J. Numer. Methods Eng. 49, 1547–1569 (2000)

    Article  MATH  Google Scholar 

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Authors and Affiliations

  1. State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, 200240, Shanghai, People’s Republic of China

    Jian-Bin Zhou, Jie-Yu Chen, Guang Meng & Wen-Ming Zhang

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  1. Jian-Bin Zhou
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  2. Jie-Yu Chen
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  3. Guang Meng
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  4. Wen-Ming Zhang
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Correspondence to Jian-Bin Zhou.

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Zhou, JB., Chen, JY., Meng, G. et al. Scale-dependent analysis of sliding wear between the bushing and the ground plane in micromotors. Arch Appl Mech 79, 301–310 (2009). https://doi.org/10.1007/s00419-008-0229-2

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  • DOI: https://doi.org/10.1007/s00419-008-0229-2

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