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Ag/DNQ-novolac-based nanocomposite films for controllable UV lithography morphological patterning

Colloid and Polymer Science volume 291, pages 1787–1793 (2013)Cite this article

Abstract

In this study, the detailed characterisation of silver (Ag) nanoparticles/polymer nanocomposite chemical structure and morphology of grating has been carried out. Scanning electron microscopy measurements show spherical shape of Ag nanoparticles (40–80 nm in diameter) prepared in chloroform by reduction of silver nitrate. In the positive photoresist based on 2-diazo-2H-naphthalen-1-one (DNQ)–novolac, Ag nanoparticles were deposited from organic colloidal solution. The content of nanoparticles in the polymer matrix was varied by increasing the concentration of Ag colloidal solution. Grating was formed by contact lithography. The quantification of Ag nanoparticles and chemical analysis of Ag/DNQ-novolac-based nanocomposite was performed by means of energy dispersive X-ray analyzer and SEM/EDS. In order to study the effect of Ag nanoparticles on the DNQ-novolac-based nanocomposite structure, investigations with Fourier transform infrared spectroscopy were conducted. Ag nanoparticles cause changes associated with substituent-sensitive out-of-plane C–H bending vibrations of aromatic ring. Ag/DNQ-novolac-based nanocomposite film surface morphology and grating topography imaging were performed using atomic force microscopy. Added Ag nanoparticles change the geometrical parameters of the gratings. The split of corrugations was achieved in Ag/DNQ-novolac-patterned films. Their morphology can be tailored by altering the content of Ag nanoparticles.

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Acknowledgments

We want to express our gratitude to Ms Angelė Gudonytė from the Institute of Materials Science of Kaunas University of Technology for her help in performing UV lithography experiments.

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Authors and Affiliations

  1. Kaunas University of Technology, Clothing and Polymeric Products Technology, Kaunas, Lithuania

    Jovita Pudlauskaitė & Virginija Jankauskaitė

  2. Institute of Material Science, Kaunas University of Technology, Kaunas, Lithuania

    Algirdas Lazauskas, Igoris Prosyčevas & Pranas Narmontas

Authors
  1. Jovita Pudlauskaitė
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  2. Virginija Jankauskaitė
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  3. Algirdas Lazauskas
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  4. Igoris Prosyčevas
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Correspondence to Jovita Pudlauskaitė.

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Pudlauskaitė, J., Jankauskaitė, V., Lazauskas, A. et al. Ag/DNQ-novolac-based nanocomposite films for controllable UV lithography morphological patterning. Colloid Polym Sci 291, 1787–1793 (2013). https://doi.org/10.1007/s00396-013-3008-8

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  • DOI: https://doi.org/10.1007/s00396-013-3008-8

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