Mass flow rate measurements in gas micro flows
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The main objective of this experimental investigation on the gas flow slip regime is to measure the mass flow rate in isothermal steady flows through cylindrical micro tubes. Two technical procedures devoted to mass flow rate measurements are compared, and the measured values are also compared with the results yielded by different approximated analytical solutions of the gas dynamics continuum equations. Satisfactory results are obtained and the way is clearly opened to measuring mass flow rates for higher Knudsen numbers, over all the micro flow transitional regime.
KeywordsMass Flow Rate Velocity Slip Knudsen Number Accommodation Coefficient Slip Regime
The authors are grateful to the CNRS (Science Research Council)—project number MI2F03-45, the Conseil Régional Provence Alpes Côtes d’Azur and the SERES company for their financial support. They also thank R. Notonier and A. Tonetto from the “Service Commun de Microscopie Electronique”.
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