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Novel system for simultaneously measuring the thickness and refractive index of a transparent plate with two optical paths

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Abstract

This study designs and characterizes a novel optical system for simultaneously measuring the thickness (> 1 mm) and refractive index of a transparent plate with two optical paths. The proposed optical system is based on triangulation methods. In contrast to exiting optical system based on triangulation methods for simultaneous measurements of thickness and refractive index of a transparent plate, the proposed optical system can measure a greater thickness with a simpler structure and lower cost. The two optical paths are combined using a self-written measurement processing algorithm to simultaneously calculate the thickness and refractive index. The principle and measurement methodology of the proposed optical system are analyzed and explained. The performance of the proposed optical system is then verified and evaluated experimentally using a laboratory-built prototype. The experimental results show that the measured thicknesses and refractive indexes for Sample B (the thickness > 1 mm) are in good agreement with those determined by a commercial instrument with the maximum deviation of 0.019% for the thickness d and 0.007% for the refractive index n, respectively.

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References

  1. I.K. Ilev, R.W. Waynant, K.R. Byrnes, J.J. Anders, Dual-confocal fiber-optic method for absolute measurement of refractive index and thickness of optically transparent media. Opt. Lett. 27(19), 1693–1695 (2002)

    Article  ADS  Google Scholar 

  2. G. Coppola, P. Ferraro, M. Iodice, S.D. Nicola, Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer. Appl. Opt. 42(19), 3882–3887 (2003)

    Article  ADS  Google Scholar 

  3. T. Fukano, I. Yamaguchi, Separation of measurement of the refractive index and the geometrical thickness by use of a wavelength-scanning interferometer with a confocal microscope. Appl. Opt. 38(19), 4065–4073 (1999)

    Article  ADS  Google Scholar 

  4. S.A. Reza, M. Qasim, Nonbulk motion system for simultaneously measuring the refractive index and thickness of a sample using tunable optics and spatial signal processing-based Gaussian beam imaging. Appl. Opt. 55(2), 368–378 (2016)

    Article  ADS  Google Scholar 

  5. J.H. Kang, C.B. Lee, J.Y. Joo, S.K. Lee, Phase-locked loop based on machine surface topography measurement using lensed fibers. Appl. Opt. 50, 460–467 (2011)

    Article  ADS  Google Scholar 

  6. C.S. Liu, Z.Y. Wang, Y.C. Chang, Design and characterization of high-performance autofocusing microscope with zoom in/out functions. Appl. Phys. B 121(1), 69–80 (2015)

    Article  ADS  Google Scholar 

  7. C.S. Liu, S.H. Jiang, Precise autofocusing microscope with rapid response. Opt. Lasers Eng. 66, 294–300 (2015)

    Article  Google Scholar 

  8. C.S. Liu, S.H. Jiang, Design and experimental validation of novel enhanced-performance autofocusing microscope. Appl. Phys. B 117(4), 1161–1171 (2014)

    Article  ADS  Google Scholar 

  9. S. Srisuwan, C. Sirisathitkul, S. Danworaphong, Validiation of photometric ellipsometry for refractive index and thickness measurements. MAPAN-J. Metrol. Soc. India 30(1), 31–36 (2015)

    Google Scholar 

  10. C. Moreno-Hernández, D. Monzón-Hernández, I. Hernández-Romano, J. Villatoro, Single tapered fiber tip for simultaneous measurements of thickness, refractive index and distance to a sample. Opt. Express 23(17), 22141–22148 (2015)

    Article  ADS  Google Scholar 

  11. J.A. Kim, J.W. Kim, T.B. Eom, J. Jin, C.S. Kang, Vibration-insensitive measurement of thickness variation of glass panels using double-slit interferometry. Opt. Express 22(6), 6486–6494 (2014)

    Article  ADS  Google Scholar 

  12. J. Park, J. Bae, J. Jin, J.A. Kim, J.W. Kim, Vibration-insensitive measurements of the thickness profile of large glass panels. Opt. Express 23(26), 32941–32949 (2015)

    Article  ADS  Google Scholar 

  13. H. Fu, H. Li, M. Shao, N. Zhao, Y. Liu, Y. Li, X. Yan, Q. Liu, TCF-MMF-TCF fiber structure based interferometer for refractive index sensing. Opt. Lasers Eng. 69, 58–61 (2015)

    Article  Google Scholar 

  14. W.V. Sorin, D.F. Gray, Simultaneous thickness and group index measurement using optical low-coherence reflectometry. IEEE Photon. Technol. Lett. 4(1), 105–107 (1992)

    Article  ADS  Google Scholar 

  15. J. Na, H.Y. Choi, E.S. Choi, C. Lee, B.H. Lee, Self-referenced spectral interferometry for simultaneous measurements of thickness and refractive index. Appl. Opt. 48(13), 2461–2467 (2009)

    Article  ADS  Google Scholar 

  16. S. Kim, J. Na, M.J. Kim, B.H. Lee, Simultaneous measurement of refractive index and thickness by combining low-coherence interferometry and confocal optics. Opt. Express 16(8), 5516–5526 (2008)

    Article  ADS  Google Scholar 

  17. P. Balling, P. Mašika, P. Křen, M. Doležal, Length and refractive index measurement by Fourier transform interferometry and frequency comb spectroscopy. Meas. Sci. Technol. 23(9), 094001 (2012)

    Article  ADS  Google Scholar 

  18. S.C. Zilio, Simultaneous thickness and group index measurement with a single arm low-coherence interferometer. Opt. Express 22(22), 27392–27397 (2014)

    Article  ADS  Google Scholar 

  19. X. Ma, W. Xiao, F. Pan, Reconstruction method for samples with refractive index discontinuities in optical diffraction tomography. Opt. Lasers Eng. 94, 58–62 (2017)

    Article  Google Scholar 

  20. J. Li, Q. Chen, J. Zhang, Z. Zhang, Y. Zhang, C. Zuo, Optical diffraction tomography microscopy with transport of intensity equation using a light-emitting diode array. Opt. Lasers Eng. 95, 26–34 (2017)

    Article  Google Scholar 

  21. H.C. Cheng, Y.C. Liu, Simultaneous measurement of group refractive index and thickness of optical samples using optical coherence tomography. Appl. Opt. 49(5), 790–797 (2010)

    Article  ADS  Google Scholar 

  22. H.C. Cheng, C.T. Huang, Measurement of thickness and refractive index of optical samples simultaneously using full-range one-shot frequency-domain optical coherence tomography. Fiber Integrated Opt 34(3), 145–156 (2015)

    Article  ADS  Google Scholar 

  23. J. Yao, J. Huang, P. Meemon, M. Ponting, J.P. Rolland, Simultaneous estimation of thickness and refractive index of layered gradient refractive index optics using a hybrid confocal-scan swept-source optical coherence tomography system. Opt. Express 23(23), 30149–30164 (2015)

    Article  ADS  Google Scholar 

  24. D. Pristinski, V. Kozlovskaya, S.A. Sukhishvili, Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry. J. Opt. Soc. Am. A 23(10), 2639–2644 (2006)

    Article  ADS  Google Scholar 

  25. M. Mutha, R.P. Schmid, K. Schnitzlein, Ellipsometric study of molecular orientations of thermomyces lanuginosus lipase at the air–water interface by simultaneous determination of refractive index and thickness. Colloid Surf. Biointerfaces 140, 60–66 (2016)

    Article  Google Scholar 

  26. J. Räsänen, K.E. Peiponen, On-line measurement of the thickness and optical quality of float glass with a sensor based on a diffractive element. Appl. Opt. 40(28), 5034–5039 (2001)

    Article  ADS  Google Scholar 

  27. C.H. Liu, Z.H. Li, Application of the astigmatic method to the thickness measurement of glass substrates. Appl. Opt. 47(21), 3968–3972 (2008)

    Article  ADS  Google Scholar 

  28. C.H. Liu, S.C. Yeh, H.L. Huang, Thickness measurement system for transparent plates using dual digital versatile disc (DVD) pickups. Appl. Opt. 49(4), 637–643 (2010)

    Article  ADS  Google Scholar 

  29. C.H. Liu, C.C. Liu, W.C. Huang, Application of astigmatic method and Snell’s law on the thickness and refractive index measurement of a transparent plate. Microsyst. Technol. 19(11), 1761–1766 (2013)

    Article  Google Scholar 

  30. J. Sun, J. Zhang, Z. Liu, G. Zhang, A vision measurement model of laser displacement sensor and its calibration method. Opt. Lasers Eng. 51, 1344–1352 (2013)

    Article  Google Scholar 

  31. C.S. Liu, S.H. Jiang, A novel laser displacement sensor with improved robustness toward geometrical fluctuations of the laser beam. Meas. Sci. Technol. 24(1-), 105101 (2013) -105101–8

    Article  ADS  MathSciNet  Google Scholar 

  32. https://www.micro-epsilon.com/

  33. P.D. Lin, New Computation Methods for Geometrical Optics (Springer, 2013)

  34. C.Y. Tsai, Free-form surface design method for a collimator TIR lens. J. Opt. Soc. Am. A-Opt. Image Sci. Vis. 33(4), 785–792 (2016)

    Article  ADS  Google Scholar 

  35. Y.T. Chen, W.C. Lin, C.S. Liu, Design and experimental verification of novel six-degree-of freedom geometric error measurement system for linear stage. Opt. Lasers Eng. 92, 94–104 (2017)

    Article  Google Scholar 

  36. Y.T. Chen, Y.S. Huang, C.S. Liu, An optical sensor for measuring the position and slanting direction of flat surfaces, Sensors 16(7), 1061-1–1061-13 (2016)

    Google Scholar 

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Acknowledgements

The authors gratefully acknowledge the financial support provided to this study by the Ministry of Science and Technology of Taiwan under Grant Nos. MOST 106-2628-E-194-001-MY3, 106-2622-E-194-005-CC3, 106-2622-E-194-004-CC2, 106-2218-E-194-002, 106-3114-8-194-001, 105-2221-E-194-013-MY5, 105-2218-E-194-004, 105-2218-E-194-003, and 103-2221-E-194-006-MY3.

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Liu, CS., Wang, TY. & Chen, YT. Novel system for simultaneously measuring the thickness and refractive index of a transparent plate with two optical paths. Appl. Phys. B 124, 180 (2018). https://doi.org/10.1007/s00340-018-7052-4

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