Abstract
This study designs and characterizes a novel optical system for simultaneously measuring the thickness (> 1 mm) and refractive index of a transparent plate with two optical paths. The proposed optical system is based on triangulation methods. In contrast to exiting optical system based on triangulation methods for simultaneous measurements of thickness and refractive index of a transparent plate, the proposed optical system can measure a greater thickness with a simpler structure and lower cost. The two optical paths are combined using a self-written measurement processing algorithm to simultaneously calculate the thickness and refractive index. The principle and measurement methodology of the proposed optical system are analyzed and explained. The performance of the proposed optical system is then verified and evaluated experimentally using a laboratory-built prototype. The experimental results show that the measured thicknesses and refractive indexes for Sample B (the thickness > 1 mm) are in good agreement with those determined by a commercial instrument with the maximum deviation of 0.019% for the thickness d and 0.007% for the refractive index n, respectively.
Similar content being viewed by others
References
I.K. Ilev, R.W. Waynant, K.R. Byrnes, J.J. Anders, Dual-confocal fiber-optic method for absolute measurement of refractive index and thickness of optically transparent media. Opt. Lett. 27(19), 1693–1695 (2002)
G. Coppola, P. Ferraro, M. Iodice, S.D. Nicola, Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer. Appl. Opt. 42(19), 3882–3887 (2003)
T. Fukano, I. Yamaguchi, Separation of measurement of the refractive index and the geometrical thickness by use of a wavelength-scanning interferometer with a confocal microscope. Appl. Opt. 38(19), 4065–4073 (1999)
S.A. Reza, M. Qasim, Nonbulk motion system for simultaneously measuring the refractive index and thickness of a sample using tunable optics and spatial signal processing-based Gaussian beam imaging. Appl. Opt. 55(2), 368–378 (2016)
J.H. Kang, C.B. Lee, J.Y. Joo, S.K. Lee, Phase-locked loop based on machine surface topography measurement using lensed fibers. Appl. Opt. 50, 460–467 (2011)
C.S. Liu, Z.Y. Wang, Y.C. Chang, Design and characterization of high-performance autofocusing microscope with zoom in/out functions. Appl. Phys. B 121(1), 69–80 (2015)
C.S. Liu, S.H. Jiang, Precise autofocusing microscope with rapid response. Opt. Lasers Eng. 66, 294–300 (2015)
C.S. Liu, S.H. Jiang, Design and experimental validation of novel enhanced-performance autofocusing microscope. Appl. Phys. B 117(4), 1161–1171 (2014)
S. Srisuwan, C. Sirisathitkul, S. Danworaphong, Validiation of photometric ellipsometry for refractive index and thickness measurements. MAPAN-J. Metrol. Soc. India 30(1), 31–36 (2015)
C. Moreno-Hernández, D. Monzón-Hernández, I. Hernández-Romano, J. Villatoro, Single tapered fiber tip for simultaneous measurements of thickness, refractive index and distance to a sample. Opt. Express 23(17), 22141–22148 (2015)
J.A. Kim, J.W. Kim, T.B. Eom, J. Jin, C.S. Kang, Vibration-insensitive measurement of thickness variation of glass panels using double-slit interferometry. Opt. Express 22(6), 6486–6494 (2014)
J. Park, J. Bae, J. Jin, J.A. Kim, J.W. Kim, Vibration-insensitive measurements of the thickness profile of large glass panels. Opt. Express 23(26), 32941–32949 (2015)
H. Fu, H. Li, M. Shao, N. Zhao, Y. Liu, Y. Li, X. Yan, Q. Liu, TCF-MMF-TCF fiber structure based interferometer for refractive index sensing. Opt. Lasers Eng. 69, 58–61 (2015)
W.V. Sorin, D.F. Gray, Simultaneous thickness and group index measurement using optical low-coherence reflectometry. IEEE Photon. Technol. Lett. 4(1), 105–107 (1992)
J. Na, H.Y. Choi, E.S. Choi, C. Lee, B.H. Lee, Self-referenced spectral interferometry for simultaneous measurements of thickness and refractive index. Appl. Opt. 48(13), 2461–2467 (2009)
S. Kim, J. Na, M.J. Kim, B.H. Lee, Simultaneous measurement of refractive index and thickness by combining low-coherence interferometry and confocal optics. Opt. Express 16(8), 5516–5526 (2008)
P. Balling, P. Mašika, P. Křen, M. Doležal, Length and refractive index measurement by Fourier transform interferometry and frequency comb spectroscopy. Meas. Sci. Technol. 23(9), 094001 (2012)
S.C. Zilio, Simultaneous thickness and group index measurement with a single arm low-coherence interferometer. Opt. Express 22(22), 27392–27397 (2014)
X. Ma, W. Xiao, F. Pan, Reconstruction method for samples with refractive index discontinuities in optical diffraction tomography. Opt. Lasers Eng. 94, 58–62 (2017)
J. Li, Q. Chen, J. Zhang, Z. Zhang, Y. Zhang, C. Zuo, Optical diffraction tomography microscopy with transport of intensity equation using a light-emitting diode array. Opt. Lasers Eng. 95, 26–34 (2017)
H.C. Cheng, Y.C. Liu, Simultaneous measurement of group refractive index and thickness of optical samples using optical coherence tomography. Appl. Opt. 49(5), 790–797 (2010)
H.C. Cheng, C.T. Huang, Measurement of thickness and refractive index of optical samples simultaneously using full-range one-shot frequency-domain optical coherence tomography. Fiber Integrated Opt 34(3), 145–156 (2015)
J. Yao, J. Huang, P. Meemon, M. Ponting, J.P. Rolland, Simultaneous estimation of thickness and refractive index of layered gradient refractive index optics using a hybrid confocal-scan swept-source optical coherence tomography system. Opt. Express 23(23), 30149–30164 (2015)
D. Pristinski, V. Kozlovskaya, S.A. Sukhishvili, Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry. J. Opt. Soc. Am. A 23(10), 2639–2644 (2006)
M. Mutha, R.P. Schmid, K. Schnitzlein, Ellipsometric study of molecular orientations of thermomyces lanuginosus lipase at the air–water interface by simultaneous determination of refractive index and thickness. Colloid Surf. Biointerfaces 140, 60–66 (2016)
J. Räsänen, K.E. Peiponen, On-line measurement of the thickness and optical quality of float glass with a sensor based on a diffractive element. Appl. Opt. 40(28), 5034–5039 (2001)
C.H. Liu, Z.H. Li, Application of the astigmatic method to the thickness measurement of glass substrates. Appl. Opt. 47(21), 3968–3972 (2008)
C.H. Liu, S.C. Yeh, H.L. Huang, Thickness measurement system for transparent plates using dual digital versatile disc (DVD) pickups. Appl. Opt. 49(4), 637–643 (2010)
C.H. Liu, C.C. Liu, W.C. Huang, Application of astigmatic method and Snell’s law on the thickness and refractive index measurement of a transparent plate. Microsyst. Technol. 19(11), 1761–1766 (2013)
J. Sun, J. Zhang, Z. Liu, G. Zhang, A vision measurement model of laser displacement sensor and its calibration method. Opt. Lasers Eng. 51, 1344–1352 (2013)
C.S. Liu, S.H. Jiang, A novel laser displacement sensor with improved robustness toward geometrical fluctuations of the laser beam. Meas. Sci. Technol. 24(1-), 105101 (2013) -105101–8
P.D. Lin, New Computation Methods for Geometrical Optics (Springer, 2013)
C.Y. Tsai, Free-form surface design method for a collimator TIR lens. J. Opt. Soc. Am. A-Opt. Image Sci. Vis. 33(4), 785–792 (2016)
Y.T. Chen, W.C. Lin, C.S. Liu, Design and experimental verification of novel six-degree-of freedom geometric error measurement system for linear stage. Opt. Lasers Eng. 92, 94–104 (2017)
Y.T. Chen, Y.S. Huang, C.S. Liu, An optical sensor for measuring the position and slanting direction of flat surfaces, Sensors 16(7), 1061-1–1061-13 (2016)
Acknowledgements
The authors gratefully acknowledge the financial support provided to this study by the Ministry of Science and Technology of Taiwan under Grant Nos. MOST 106-2628-E-194-001-MY3, 106-2622-E-194-005-CC3, 106-2622-E-194-004-CC2, 106-2218-E-194-002, 106-3114-8-194-001, 105-2221-E-194-013-MY5, 105-2218-E-194-004, 105-2218-E-194-003, and 103-2221-E-194-006-MY3.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Liu, CS., Wang, TY. & Chen, YT. Novel system for simultaneously measuring the thickness and refractive index of a transparent plate with two optical paths. Appl. Phys. B 124, 180 (2018). https://doi.org/10.1007/s00340-018-7052-4
Received:
Accepted:
Published:
DOI: https://doi.org/10.1007/s00340-018-7052-4