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A novel vibration sensor based on phase grating interferometry

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Abstract

Vibration sensors with high accuracy and reliability are needed urgently for vibration measurement. In this paper a vibration sensor with nanometer resolution is developed. This sensor is based on the principle of phase grating interference for displacement measurement and spatial polarization phase-shift interference technology, and photoelectric counting and A/D signal subdivision are adopted for vibration data output. A vibration measurement system consisting of vibration actuator and displacement adjusting device has been designed to test the vibration sensor. The high resolution and high reliability of the sensor are verified through a series of comparison experiments with Doppler interferometer.

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References

  1. A.P. Adewuyi, Z. Wu, Comput. Aided Civ. Inf. 26, 3 (2011)

    Article  Google Scholar 

  2. M. Boscolo, Compos. Struct. 100, 12 (2013)

    Article  Google Scholar 

  3. J Zhang, B Gan: Procedia Engineering 15 (2011)

  4. B.J. Halkon, S.J. Rothberg, Mech. Syst. Signal Process. 46, 2 (2014)

    Article  Google Scholar 

  5. P.R. Helinger, J.N. Reddy, J. Sound Vib. 126, 2 (1988)

    Google Scholar 

  6. Z. Wu, W. Chen, Compos. Struct. 84, 4 (2008)

    Google Scholar 

  7. M.V.V. de Araujo, R. Nicoletti, Mech. Syst. Signal. Pr. 52, 685–699 (2015)

    Article  Google Scholar 

  8. S. Saadon, O. Sidek, Energ. Convers. Manag. 52, 1 (2011)

    Article  Google Scholar 

  9. A. Lei, R. Xu, L.M. Borregaard, M. Guizzetti, E.V. Thomsen, Procedia Eng. 47, 554–557 (2012)

    Article  Google Scholar 

  10. P.G. Jia, D.H. Wang, Meas. Sci. Technol. 23, 11 (2012)

    Article  Google Scholar 

  11. Y. Tao, M. Wang, D. Guo, H. Hao, Q. Liu, Opt. Commun. 340, 141–150 (2015)

    Article  ADS  Google Scholar 

  12. F. Joud, F. Laloe, M. Atlan, J. Hare, M. Gross, Opt. Express 17, 4 (2009)

    Article  Google Scholar 

  13. F. Joud, F. Verpillat, F. Laloe, M. Atlan, J. Hare, M. Gross, Opt. Lett. 34, 23 (2009)

    Article  Google Scholar 

  14. Y. Fu, M. Guo, P.B. Phua, Appl. Opt. 50, 10 (2011)

    Article  Google Scholar 

  15. C.E. Riva, B.L. Petrig, R.D. Shonat, C.J. Pournaras, Appl. Opt. 28, 6 (1989)

    Article  Google Scholar 

  16. D. Garcia-Vizcaino, F. Dios, J. Recolons, Opt. Eng. 47, 12 (2008)

    Article  Google Scholar 

  17. A. Fischer, J. Czarske, Optik 121, 20 (2010)

    Article  Google Scholar 

  18. A. Ju, C. Zhong, W. Hou, Optik 126, 1 (2015)

    Article  Google Scholar 

  19. J. Yang, X. Li, J. Yang, J. Liu, X. Su, Opt. Laser Technol. 42, 6 (2010)

    Google Scholar 

  20. A. Rogers, Essent. Optoelectron (Springer, US, 1997)

    Book  Google Scholar 

  21. R. Maeda, J.J. Tsaur, S.H. Lee, M. Ichiki, J. Electroceram. 12, 1–2 (2004)

    Article  Google Scholar 

  22. N. Lobontiu, J.S.N. Paine, J. Mech. Design. 123, 3 (2001)

    Article  Google Scholar 

Download references

Acknowledgement

The authors gratefully acknowledge the support of the State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology.

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Authors and Affiliations

  1. The State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, 1037 Luoyu Road, Wuhan, China

    Qian Li, Xiaojun Liu, Zili Lei & Lei Guo

  2. Automotive Engineering College, Xiangyang Vocational and Technical College, 18 Longzhong Road, Xiangyang, China

    Li Zhao

  3. College of Economics and Management, Shanghai University of Electric Power, Xuehai Road, Shanghai, China

    Zhen Lu

Authors
  1. Qian Li
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  2. Xiaojun Liu
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  3. Li Zhao
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  4. Zili Lei
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  5. Zhen Lu
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  6. Lei Guo
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Correspondence to Zili Lei.

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Li, Q., Liu, X., Zhao, L. et al. A novel vibration sensor based on phase grating interferometry. Appl. Phys. B 123, 162 (2017). https://doi.org/10.1007/s00340-017-6724-9

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  • DOI: https://doi.org/10.1007/s00340-017-6724-9

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