Abstract
Ion implantation is one of the most competitive methods for the fabrication of optical waveguide structures in optoelectronic materials. Tb3+-doped aluminum borosilicate glass has been demonstrated to be a type of magneto-optical glass with high Verdet constant. In this work, the proton implantation technique with energies of (500 + 550) keV and fluences of (1.0 + 2.0) × 1016 ions/cm2 is performed to form planar waveguides in the Tb3+-doped aluminum borosilicate glass. The guiding modes of the fabricated waveguide were measured by the prism-coupling method at wavelengths of 632.8 and 1539 nm. The near-field light intensity distribution was measured by the end-face coupling method at the wavelength of 632.8 nm and calculated by the finite-difference beam propagation method at both 632.8 and 1539 nm. The optical properties of the double-energy proton-implanted magneto-optical glass waveguides show promise for use as multi-functional integrated optical devices in the visible and near-infrared bands.
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Acknowledgements
This work was financially supported by the National Natural Science Foundation of China (Grant Nos. 11405041 and 61177084), and NUPTSF (Grant No. NY214159), and Research Center of Optical Communications Engineering & Technology, Jiangsu Province (Grant No. ZSF0401).
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Chun-Xiao Liu and Xiao-Liang Shen these authors contributed equally to this work.
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Liu, CX., Shen, XL., Zheng, RL. et al. Visible and near-infrared waveguides formed by double-energy proton implantation in magneto-optical glasses. Appl. Phys. B 123, 56 (2017). https://doi.org/10.1007/s00340-017-6644-8
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DOI: https://doi.org/10.1007/s00340-017-6644-8