Skip to main content
Log in

Fabrication of planar photonic crystals in chalcogenide glass film by maskless projection lithography

  • Published:
Applied Physics B Aims and scope Submit manuscript

Abstract

Ge20Sb15Se65 chalcogenide glass films were deposited and patterned using maskless projection lithography to create photonic crystal structures. This lithography technology, which is based on a digital micro-mirror device, is demonstrated as a powerful and low-cost tool to produce arbitrary intensity distributions to fabricate photonic devices. Direct photolithography in resist-free chalcogenide films was first studied, and results indicate that the quality of the products is insufficient. High-quality photonic crystals with sub-micrometer size were finally obtained in chalcogenide films with photoresist by maskless projection lithography and inductively coupled plasma technology.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Subscribe and save

Springer+ Basic
EUR 32.99 /Month
  • Get 10 units per month
  • Download Article/Chapter or Ebook
  • 1 Unit = 1 Article or 1 Chapter
  • Cancel anytime
Subscribe now

Buy Now

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10

Similar content being viewed by others

References

  1. S. John, Phys. Rev. Lett. 58, 2486 (1987)

    Article  ADS  Google Scholar 

  2. E. Yablonovitch, Phys. Rev. Lett. 58, 2059 (1987)

    Article  ADS  Google Scholar 

  3. K. Paivasaari, V.K. Tikhomirov, J. Turunen, Opt. Express 15, 2336 (2007)

    Article  ADS  Google Scholar 

  4. C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, J. Lucas, J. Phys. Chem. Solids 62, 1435 (2001)

    Article  ADS  Google Scholar 

  5. J.M. Harbold, F.O. Ilday, F.W. Wise, J.S. Sanghera, V.Q. Nguyen, L.B. Shaw, I.D. Aggarwal, Opt. Lett. 27, 119 (2002)

    Article  ADS  Google Scholar 

  6. A. Zakery, S.R. Elliott, J. Non-Cryst. Solids 330, 1 (2003)

    Article  ADS  Google Scholar 

  7. B.J. Eggleton, B. Luther-Davies, K. Richardson, Nat. Photon. 5, 141 (2011)

    ADS  Google Scholar 

  8. V.K. Tikhomirov, D. Furniss, A.B. Seddon, J.A. Savage, P.D. Mason, D.A. Orchard, K.L. Lewis, Infrared Phys. Technol. 45, 115 (2004)

    Article  ADS  Google Scholar 

  9. C.S. Yi, P.Q. Zhang, F.F. Chen, S.X. Dai, X.S. Wang, T.F. Xu, Q.F. Nie, Appl. Phys. B 116, 653 (2014)

    Article  ADS  Google Scholar 

  10. X. Gai, B. Luther-Davies, T.P. White, Opt. Express 20, 15503 (2012)

    Article  ADS  Google Scholar 

  11. L. Li, H. Lin, S. Qiao, Y. Zou, S. Danto, K. Richardson, J.D. Musgraves, N. Lu, J. Hu, Nat. Photon. 8, 643 (2014)

    Article  ADS  Google Scholar 

  12. J. Hu, L. Li, H. Lin, P. Zhang, W. Zhou, Z. Ma, Opt. Mater. Express 3, 1313 (2013)

    Article  Google Scholar 

  13. V.N. Astratov, A.M. Adawi, M.S. Skolnik, V.K. Tikhomirov, V.M. Lyubin, D.G. Lidzey, M. Ariu, A.L. Reynolds, Appl. Phys. Lett. 78, 4094 (2001)

    Article  ADS  Google Scholar 

  14. A. Feigel, M. Veinger, B. Sfez, A. Arsh, M. Klebanov, V. Lyubin, Appl. Phys. Lett. 83, 4480 (2003)

    Article  ADS  Google Scholar 

  15. A. Feigel, M. Veinger, B. Sfez, A. Arsh, M. Klebanov, V. Lyubin, Thin Solid Films 488, 185 (2005)

    Article  ADS  Google Scholar 

  16. S. Wong, M. Deubel, F. Pérez-Willard, S. John, G.A. Ozin, M. Wegener, G. von Freymann, Adv. Mater. 18, 265 (2006)

    Article  Google Scholar 

  17. D. Freeman, S. Madden, B. Luther-Davies, Opt. Express 13, 3079 (2005)

    Article  ADS  Google Scholar 

  18. S.J. Madden, D.Y. Choi, D.A. Bulla, A.V. Rode, B. Luther-Davies, V.G. Ta’eed, M.D. Pelusi, B.J. Eggleton, Opt. Express 15, 14414 (2007)

    Article  ADS  Google Scholar 

  19. Y. Ruan, W. Li, R. Jarvis, N. Madsen, A. Rode, B. Luther-Davies, Opt. Express 12, 5140 (2004)

    Article  ADS  Google Scholar 

  20. M.W. Lee, C. Grillet, C. Monat, E. Mägi, S. Tomljenovic-Hanic, X. Gai, S. Madden, D. Choi, D. Bulla, B. Luther-Davies, B.J. Eggleton, Opt. Express 18, 26695–26703 (2010)

    Article  ADS  Google Scholar 

  21. X. Gai, D. Choi, S. Madden, B. Luther-Davies, Opt. Express 20, 13513–13521 (2012)

    Article  ADS  Google Scholar 

  22. C. Wagner, N. Harned, Nat. Photon. 4, 24 (2010)

    Article  ADS  Google Scholar 

  23. N.J. Jenness, R.T. Hill, A. Hucknall, A. Chilkoti, R.L. Clark, Opt. Express 18, 11754 (2010)

    Article  ADS  Google Scholar 

  24. K. Itoga, J. Kobayashi, M. Yamato, A. Kikuchi, T. Okano, Biomaterials 27, 3005 (2006)

    Article  Google Scholar 

  25. W. Wan, W. Huang, D. Pu, W. Qiao, Y. Ye, G. Wei, Z. Fang, X. Zhou, L. Chen, Opt. Express 23, 31926 (2015)

    Article  ADS  Google Scholar 

  26. C. Liu, X. Guo, F. Gao, B. Luo, X. Duan, J. Du, C. Qiu, Proc. SPIE 5645, 307 (2005)

    Article  ADS  Google Scholar 

  27. S.X. Dai, B. Peng, P.J. Zhang, T.F. Xu, X.S. Wang, Q.H. Nie, X.H. Zhang, J. Non-Cryst. Solids 356, 2424 (2010)

    Article  ADS  Google Scholar 

  28. W. Zhang, S. Dai, X. Shen, Y. Chen, S. Zhao, C. Lin, L. Zhang, J. Bai, Mater. Lett. 98, 42 (2013)

    Article  Google Scholar 

  29. E.R. Shaaban, M.A. Kaid, E.S. Moustafa, A. Adel, J. Phys. D Appl. Phys. 41, 1 (2008)

    Article  Google Scholar 

  30. V. Nazabal, P. Neme, A.M. Jurdyc, S. Zhang, F. Charpentiera, H. Lhermited, J. Charriere, J.P. Guinf, A. Moreacg, M. Frumarb, J.-L. Adama, Thin Solid Films 518, 4941 (2010)

    Article  ADS  Google Scholar 

  31. J. Li, F. Chen, X. Shen, S.-X. Dai, T.-F. Xu, Q.-H. Nie, Optoelectron. Lett. 11, 203–206 (2015)

    Article  ADS  Google Scholar 

  32. S. Shi, C. Chen, D.W. Prather, J. Opt. Soc. Am. A 21, 1769–1775 (2004)

    Article  ADS  Google Scholar 

  33. Z.Y. Li, L.L. Lin, Phys. Rev. E 67, 046607 (2003)

    Article  ADS  Google Scholar 

Download references

Acknowledgments

This work was supported by the National Natural Science Foundation of China (Nos. 61307060, 61435009) and K. C. Wong Magna Fund in Ningbo University.

Author information

Authors and Affiliations

Authors

Corresponding authors

Correspondence to Peiqing Zhang or Shixun Dai.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Zhang, P., Zhang, Q., Zeng, J. et al. Fabrication of planar photonic crystals in chalcogenide glass film by maskless projection lithography. Appl. Phys. B 122, 244 (2016). https://doi.org/10.1007/s00340-016-6521-x

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s00340-016-6521-x

Keywords

Navigation