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Design and experimental validation of novel optics-based autofocusing microscope

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Abstract

This study designs and characterizes a novel precise optics-based autofocusing microscope with both the large linear autofocusing range and the rapid response. In contrast to conventional optics-based autofocusing microscopes with centroid method, the proposed microscope comprises two optical paths, namely one optical path which provides a short linear autofocusing range but an extremely high focusing accuracy and a second optical path which achieves a long linear autofocusing range but a reduced focusing accuracy. The two optical paths are combined using a self-written autofocus-processing algorithm to realize an autofocusing microscope with a large linear autofocusing range, a rapid response, and a high focusing accuracy. The microscope is characterized numerically using commercial software ZEMAX and is then verified experimentally using a laboratory-built prototype. The experimental results show that compared to conventional optics-based autofocusing microscopes with centroid method and a single optical path, the proposed microscope achieves both a longer autofocusing range and a more rapid response with no reduction in the focusing accuracy. Overall, the results presented in this study show that the proposed microscope provides an ideal solution for automatic optical inspection and industrial applications.

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Acknowledgments

The authors gratefully acknowledge the financial support provided to this study by the National Science Council of Taiwan under Grant No. NSC 100-2218-E-194-008. The authors would like to express their thanks to Mr. Yu-Hsiu Chang of the Laser Application Technology Center, Industrial Technology Research Institute, Taiwan, for his technological assistance throughout the course of the study.

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Authors and Affiliations

  1. Department of Mechanical Engineering, National Chung Cheng University, No.168, University Road, Minhsiung Township, Chiayi, 62102, Taiwan

    Chien-Sheng Liu

  2. Laser Application Technology Center Industrial Technology Research Institute, R208, No. 8, Gongyan Rd., Liujia Shiang, Tainan, 734, Taiwan

    Pin-Hao Hu & Yang-Cheng Lin

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  1. Chien-Sheng Liu
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  2. Pin-Hao Hu
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Correspondence to Chien-Sheng Liu.

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Liu, CS., Hu, PH. & Lin, YC. Design and experimental validation of novel optics-based autofocusing microscope. Appl. Phys. B 109, 259–268 (2012). https://doi.org/10.1007/s00340-012-5171-x

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