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Multi-shot interference approach for any kind of Bravais lattice

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Abstract

A mathematical scheme capable of describing the features of the photolithographic multi-beam–multi-shot approach is introduced here. We will show in detail how such a technique can reproduce any of the fourteen three-dimensional Bravais lattices. Furthermore, we will mathematically show the independence of the lattice constant of the structure from the laser wavelength. Finally, we will compare the four-beams–one-shot and the three-beams–three-shots techniques by means of simulations reproducing opal and connected FCC-like lattices.

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Authors and Affiliations

  1. State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun, 130012, China

    R. Proietti Zaccaria & H.-B. Sun

  2. LaSIE, Department of Applied Physics, Osaka University, 2-1 Yamada-Oka, Suita, Osaka, 565-0871, Japan

    R. Proietti Zaccaria, S. Shoji & S. Kawata

Authors
  1. R. Proietti Zaccaria
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  2. S. Shoji
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  3. H.-B. Sun
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  4. S. Kawata
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Correspondence to R. Proietti Zaccaria.

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Proietti Zaccaria, R., Shoji, S., Sun, HB. et al. Multi-shot interference approach for any kind of Bravais lattice. Appl. Phys. B 93, 251–256 (2008). https://doi.org/10.1007/s00340-008-3158-4

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  • DOI: https://doi.org/10.1007/s00340-008-3158-4

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