Excimer ArF laser with an output energy of 1.3 J at 2.0% efficiency on the He:Ar:F₂ mixture

Abstract

In this paper it is shown that to achieve a maximum efficiency and high output energy of an ArF (193 nm) excimer laser, one should use optimal pump intensity. It has been shown experimentally that the optimal pump intensity for an ArF excimer laser with the mixture of He:Ar:F₂ has a value of 4.5–5.0 MW/cm³. The results of an experimental study of the pump and active medium parameters effect on the efficiency and output energy of the ArF excimer laser on the mixture of He:Ar:F₂ are presented. To provide high pump intensity of an active medium, the excitation scheme of the LC-inverter type has been used where the current return conductor inductance had been increased from 30 to 80 nH. This allows the pump to achieve levels of intensity above 5.0 MW/cm³. By using the pump intensity of 5.0 MW/cm³ in an active medium of He:Ar:F₂–79.7:20:0.3 at total pressure of 2.4 atm, we are the first to obtain the output energy of 1.3 J at the total efficiency of 2.0%. The pulse duration (FWHM) was 15±1 ns and the peak pulse power was 85 MW.