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100-kHz diffraction-limited femtosecond laser micromachining

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Abstract

We demonstrate active and adaptive wavefront correction of a 100-kHz amplified femtosecond laser chain, and investigate the subsequent improvement for micromachining applications. Thanks to a non-pixelated liquid-crystal modulator, phase-front distortions are decreased down to λ/15 peak–valley and λ/100 rms. Clean 1.7-μm diffraction-limited microholes are obtained, both on low-threshold metallic and high-threshold dielectric materials. This high beam quality femtosecond source enables diffraction-limited high-speed micromachining.

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Authors and Affiliations

  1. Laboratoire Traitement du Signal et Instrumentation, UMR CNRS 5516, 10 Rue Barrouin, Bât. F, 42000, Saint-Etienne, France

    N. Sanner, N. Huot, E. Audouard & P. Laporte

  2. Thalès Research and Technology, Domaine de Corbeville, 91404, Orsay Cedex, France

    C. Larat & J.P. Huignard

Authors
  1. N. Sanner
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  2. N. Huot
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  3. E. Audouard
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  4. C. Larat
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  5. P. Laporte
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  6. J.P. Huignard
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Correspondence to N. Sanner.

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PACS

87.80.Mj; 42.60.Jf; 42.65.Re

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Sanner, N., Huot, N., Audouard, E. et al. 100-kHz diffraction-limited femtosecond laser micromachining. Appl. Phys. B 80, 27–30 (2005). https://doi.org/10.1007/s00340-004-1697-x

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  • DOI: https://doi.org/10.1007/s00340-004-1697-x

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