Abstract.
This work reports the measurement of the nano-scale physical properties of surface vacancies and the extraction of the types and concentrations of dopant atoms and point defects inside compound semiconductors, primarily by cross-sectional scanning tunneling microscopy on cleavage surfaces of III–V semiconductors. The results provide the basis to determine the physical mechanisms governing the interactions, the formation, the electronic properties, and the compensation effects of surface as well as bulk point defects and dopant atoms.
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Received: 10 May 2001 / Accepted: 23 July 2001 / Published online: 3 April 2002
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Ebert, P. Defects in III–V semiconductor surfaces . Appl Phys A 75, 101–112 (2002). https://doi.org/10.1007/s003390101059
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DOI: https://doi.org/10.1007/s003390101059