Skip to main content
SpringerLink
Log in

The early oxynitridation stages of hydrogen-terminated (100) silicon after exposure to N2:N2O. Nitrogen bonding states

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract.

Nitridation of hydrogen-terminated silicon in a diluted N2:N2O atmosphere was studied by X-ray photoemission spectroscopy and high-resolution electron microscopy. Our analysis showed that the broad N(1s) peak of width 1.5 eV at 398–399 eV, usually reported in the literature, is preceded by the formation of a narrow peak of width around 1.0 eV at 397.5 eV, attributed to the moiety Si3N in which silicon is only marginally oxidized, and two other peaks at 400.0 eV and 401.5 eV, attributed to the moieties Si2NOSi and SiNO, respectively.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

Author information

Authors and Affiliations

  1. STMicroelectronics, Stradale Primosole 50, 95100 Catania CT, Italy, , , , , , IT

    G.F. Cerofolini, M. Camalleri, C. Galati, S. Lorenti, L. Renna & O. Viscuso

  2. CNR – Institute of Microelectronics and Microsystems, Stradale Primosole 50, 95100 Catania CT, Italy, , , , , , IT

    C. Bongiorno & C. Spinella

  3. Department of Chemistry, University of Catania, 95100 Catania CT, Italy, , , , , , IT

    G.G. Condorelli & I.L. Fragalà

Authors
  1. G.F. Cerofolini
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. C. Bongiorno
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. Camalleri
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. G.G. Condorelli
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. I.L. Fragalà
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. C. Galati
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. S. Lorenti
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. L. Renna
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. C. Spinella
    View author publications

    You can also search for this author in PubMed Google Scholar

  10. O. Viscuso
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Received: 11 July 2001 / Accepted: 19 September 2001 / Published online: 20 December 2001

Rights and permissions

Reprints and permissions

About this article

Cite this article

Cerofolini, G., Bongiorno, C., Camalleri, M. et al. The early oxynitridation stages of hydrogen-terminated (100) silicon after exposure to N2:N2O. Nitrogen bonding states . Appl Phys A 75, 585–590 (2002). https://doi.org/10.1007/s003390101033

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1007/s003390101033

Search

Navigation