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Formation of amorphous layers by solid-state reaction. from thin Ir films on Si(100)

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Authors and Affiliations

  1. Universität Erlangen-Nürnberg, Lehrstuhl für Mikrocharakterisierung, Cauerstrasse 6, 91058 Erlangen, Germany (Fax: +49-9131/8528-602), , , , , , DE

    V. Demuth & H.P. Strunk

  2. Universität Erlangen-Nürnberg Institut für Angewandte Physik, Staudtstrasse 7, 91058 Erlangen, Germany, , , , , , DE

    D. Wörle, C. Kumpf, E. Burkel & M. Schulz

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  1. V. Demuth
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  2. H.P. Strunk
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  3. D. Wörle
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  4. C. Kumpf
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  5. E. Burkel
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  6. M. Schulz
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Received: 18 November 1997 / Accepted: 16 October 1998 / Published online: 24 February 1999

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Demuth, V., Strunk, H., Wörle, D. et al. Formation of amorphous layers by solid-state reaction. from thin Ir films on Si(100) . Appl Phys A 68, 451–455 (1999). https://doi.org/10.1007/s003390050922

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  • DOI: https://doi.org/10.1007/s003390050922

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