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Received: 21 October 1998 / Accepted: 23 October 1998
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Haberland, K., Kurpas, P., Pristovsek, M. et al. Spectroscopic process sensors in MOVPE device production . Appl Phys A 68, 309–313 (1999). https://doi.org/10.1007/s003390050893
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DOI: https://doi.org/10.1007/s003390050893