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AFM studies of surface morphologies of sputtered SrTiO3 films and annealed MgO substrates

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films on single-crystal MgO(100) substrates. Meanwhile, surface morphologies of as-polished and post-annealed MgO(100) substrates are investigated as well. Effects of the miscut (or misorientation) of the substrate surface on morphologies and growth mechanisms are discussed. For comparison, a typical surface morphology and growth mechanism of the spiral island structure in sputtered PrBa2Cu3O7-δ films on MgO(100) substrates are presented.

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Authors and Affiliations

  1. Low Temperature Division, Department of Applied Physics, University of Twente, P.O. Box 217, 7500 AE, Enschede, The Netherlands (Fax: +31-53/489-1099, E-mail: mng@el.utwente.nl; gma@tn.utwente.nl), , , , , , NL

    Q. Meng, R. Moerman, A.H. Sonnenberg & G.J. Gerritsma

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  1. Q. Meng
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  2. R. Moerman
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  3. A.H. Sonnenberg
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  4. G.J. Gerritsma
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Received: 27 March 1998

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Meng, Q., Moerman, R., Sonnenberg, A. et al. AFM studies of surface morphologies of sputtered SrTiO3 films and annealed MgO substrates . Appl Phys A 68, 239–245 (1999). https://doi.org/10.1007/s003390050882

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  • DOI: https://doi.org/10.1007/s003390050882

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