Similar content being viewed by others
Author information
Authors and Affiliations
Additional information
Received: 5 May 1998/Accepted: 14 August 1998
Rights and permissions
About this article
Cite this article
Hoshi, Y., Yoshida, H. Application of laser-guided discharge to processing . Appl Phys A 68, 93–98 (1999). https://doi.org/10.1007/s003390050859
Issue Date:
DOI: https://doi.org/10.1007/s003390050859