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Carbonaceous phases by IR laser-induced decomposition of 3-butyn-2-one

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laser radiation in the gas phase results in the deposition of carbonaceous films composed of a graphitic and monohydrogenated carbon, in which H is dominantly bonded to sp3 sites. The films incorporate oxygen in the topmost layers. The technique is suitable for the preparation of thin C-based films at low substrate temperatures.

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Authors and Affiliations

  1. Institute of Chemical Process Fundamentals, Academy of Sciences of the Czech Republic, 165 02 Prague, Czech Republic, , , , , , CZ

    V. Dřínek, M. Urbanová & J. Pola

  2. J. Heyrovský Institute of Physical Chemistry, Academy of Sciences of the Czech Republic, 182 23 Prague, Czech Republic, , , , , , CZ

    Z. Bastl

  3. Institute of Physics, Academy of Sciences of the Czech Republic, 180 40 Prague, Czech Republic, , , , , , CZ

    I. Gregora & V. Vorlíček

  4. Institute of Inorganic Chemistry, Academy of Sciences of the Czech Republic, 250 68 Řež near Prague, Czech Republic, , , , , , CZ

    J. Šubrt

Authors
  1. V. Dřínek
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  2. M. Urbanová
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  3. Z. Bastl
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  4. I. Gregora
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  5. V. Vorlíček
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  6. J. Šubrt
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  7. J. Pola
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Received: 23 July 1997/Accepted: 18 November 1997

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Dřínek, V., Urbanová, M., Bastl, Z. et al. Carbonaceous phases by IR laser-induced decomposition of 3-butyn-2-one . Appl Phys A 66, 503–509 (1998). https://doi.org/10.1007/s003390050704

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  • DOI: https://doi.org/10.1007/s003390050704

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