Similar content being viewed by others
Author information
Authors and Affiliations
Additional information
Received: 20 August 1996/Accepted: 5 November 1996
Rights and permissions
About this article
Cite this article
Zhang, J., Sugioka, K., Wada, S. et al. Dual-beam ablation of fused quartz using 266 nm and VUV lasers with different delay-times . Appl Phys A 64, 477–481 (1997). https://doi.org/10.1007/s003390050504
Issue Date:
DOI: https://doi.org/10.1007/s003390050504