Skip to main content
SpringerLink
Log in

Artificially nanostructured Cu:Al2O3 films produced by pulsed laser deposition

  • Rapid communication
  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract.

The processes leading to the formation of Cu:Al2O3 composite films on Si (001) with a well defined nanostructure by alternate pulsed laser deposition (a-PLD) in vacuum are investigated. Alternately amorphous Al2O3 layers and Cu nanocrystals nucleated on the Al2O3 surface are formed, according to the PLD sequence. The Al2O3 deposited on the Cu nanocrystals fills in the space between them until they are completely buried, and subsequently, a continuous dense layer with a very flat surface (within 1 nm) is developed. The nucleation process of the nanocrystals and their resulting oblate ellipsoidal shape are discussed in terms of the role of the energetic species involved in the PLD process and the metal–oxide interface energy.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

Author information

Authors and Affiliations

  1. Instituto de Optica, C.S.I.C., Serrano 121, 28006 Madrid, Spain (Fax: +34-91/56455-57, E-mail: rserna@io.cfmac.csic.es), , , , , , ES

    R. Serna & C.N. Afonso

  2. Lab. de Minéralogie-Cristallographie, CNRS UMR 7590, Universités Paris VI et VII, 4 Place Jussieu case 115, Paris 75252 Cedex 5, France, , , , , , FR

    C. Ricolleau, Y. Wang, Y. Zheng & M. Gandais

  3. Groupe de Physique des Solides, UMR7588, Tour 23, Universités Paris VI et VII, 4 Place Jussieu, Paris 75251 Cedex 5, France, , , , , , FR

    I. Vickridge

Authors
  1. R. Serna
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. C.N. Afonso
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. C. Ricolleau
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Y. Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Y. Zheng
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. M. Gandais
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. I. Vickridge
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Received: 4 July 2000 / Accepted: 5 July 2000 / Published online: 13 September 2000

Rights and permissions

Reprints and permissions

About this article

Cite this article

Serna, R., Afonso, C., Ricolleau, C. et al. Artificially nanostructured Cu:Al2O3 films produced by pulsed laser deposition. Appl Phys A 71, 583–586 (2000). https://doi.org/10.1007/s003390000619

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1007/s003390000619

Search

Navigation