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Impedance spectroscopic study of Si/HF-electrolyte system during Si dissolution

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Abstract.

Porous silicon (PS) has been synthesized by anodic etching in HF and ethanol electrolyte. The in situ current–voltage characteristic clearly identify the pore formation, transition and electropolishing regimes. The experimentally observed impedance and phase as a function of frequency (Bode plots) reasonably agree with theoretically simulated Bode plots drawn by considering the equivalent circuit for PS/electrolyte.

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Authors and Affiliations

  1. Institute of Physics, Sachivalaya Marg, Bhubaneswar 751 005, India, , , , , , IN

    B.K. Patel & S.N. Sahu

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  1. B.K. Patel
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  2. S.N. Sahu
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Received: 10 December 1999 / Accepted: 12 February 2000 / Published online: 13 September 2000

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Patel, B., Sahu, S. Impedance spectroscopic study of Si/HF-electrolyte system during Si dissolution . Appl Phys A 71, 695–700 (2000). https://doi.org/10.1007/s003390000506

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  • DOI: https://doi.org/10.1007/s003390000506

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