Skip to main content
SpringerLink
Log in

The mechanism of irregular hole-shape formation during ultrafast laser micro-drilling of metals

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

The micro-drilling of metals using ultrafast laser is of great interest for a wide range of industrial applications. To date, high drilling quality remains a grand challenge due to the elusive mechanism of hole shaping, especially the origin of the ellipticity and bulges that emerged at hole exits in the micro-drilling of metals. Here we reveal that the emergence of the hole ellipticity is jointly determined by the ablation threshold of the material and the polarization-dependent energy absorption on the hole wall. Besides, a special hole geometry, which is formed during the evolution of hole shape from round to ellipse, has a converging effect when the laser beams are reflected by the hole wall, and the beam-converging effect induces the formation of bulges at hole exits. These results contribute to the understanding of the mechanism of hole-shape formation in the micro-drilling of metals with ultrafast laser and provide a basis for the hole-shape control in high-quality micro-drilling.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7

Similar content being viewed by others

Data availability

All data generated and/or analyzed during this study are included in this article. The data are available from the corresponding author upon reasonable request.

References

  1. R.R. Gattass, E. Mazur, Nat. Photonics 2, 219 (2008)

    Article  ADS  Google Scholar 

  2. L. Jiang, A.D. Wang, B. Li, T.H. Cui, Y.F. Lu, Light Sci. Appl. 7, 1 (2018)

    Article  Google Scholar 

  3. K. Sugioka, Y. Cheng, Light Sci. Appl. 3, 1 (2014)

    Article  Google Scholar 

  4. S. Karimelahi, L. Abolghasemi, P.R. Herman, Appl. Phys. A Mater. Sci. Process. 114, 91 (2014)

    Article  ADS  Google Scholar 

  5. Y. Lu, Y. Duan, X. Liu, Q. Chen, H.-B. Sun, Opt. Lett. 47, 921 (2022)

    Article  ADS  Google Scholar 

  6. X. Jia, J. Dong, Y. Chen, H. Wang, G. Zhu, A. Kozlov, X. Zhu, Opt. Lett. 45, 1691 (2020)

    Article  ADS  Google Scholar 

  7. M.J.O. Laakso, S. Pagliano, U. Shah, G.E. Mårtensson, G. Stemme, F. Niklaus, Opt. Express 28, 1394 (2020)

    Article  ADS  Google Scholar 

  8. L. Romoli, R. Vallini, Opt. Lasers Eng. (2016)

  9. G. Mincuzzi, M. Faucon, R. Kling, Opt. Lasers Eng. 118, 52 (2019)

    Article  Google Scholar 

  10. Z. Zhang, W. Wang, R. Jiang, X. Zhang, Y. Xiong, Z. Mao, Opt. Laser Technol. 121, 105834 (2020)

    Article  Google Scholar 

  11. S. Döring, T. Ullsperger, F. Heisler, S. Richter, A. Tünnermann, S. Nolte, Phys. Procedia 41, 431 (2013)

    Article  ADS  Google Scholar 

  12. S. Döring, J. Szilagyi, S. Richter, F. Zimmermann, M. Richardson, A. Tünnermann, S. Nolte, Opt. Express 20, 27147 (2012)

    Article  ADS  Google Scholar 

  13. S. Marimuthu, J. Dunleavey, Y. Liu, B. Smith, A. Kiely, M. Antar, J. Mater. Process. Technol. 271, 554 (2019)

    Article  Google Scholar 

  14. I. Arrizubieta, A. Lamikiz, S. Martínez, E. Ukar, I. Tabernero, F. Girot, Int. J. Mach. Tools Manuf. 75, 55 (2013)

    Article  Google Scholar 

  15. J.H. Cho, S.J. Na, J. Phys. D. Appl. Phys. 40, 7638 (2007)

    Article  ADS  Google Scholar 

  16. K. Venkatakrishnan, B. Tan, P. Stanley, N.R. Sivakumar, J. Appl. Phys. 92, 1604 (2002)

    Article  ADS  Google Scholar 

  17. J. Yu, H. Jiang, H. Yang, Q. Gong, J. Opt. Soc. Am. B 29, 1937 (2012)

    Article  ADS  Google Scholar 

  18. M. Kraus, M.A. Ahmed, A. Michalowski, A. Voss, R. Weber, T. Graf, Opt. Express 18, 22305 (2010)

    Article  ADS  Google Scholar 

  19. J. Jiang, M. Chen, Z. Bai, C. Yang, G. Li, Opt. Rev. 20, 496 (2013)

    Article  Google Scholar 

  20. R. Wang, X. Dong, K. Wang, X. Sun, Z. Fan, W. Duan, M. Byung-Guk Jun, Appl. Surf. Sci. 537, 148001 (2021)

    Article  Google Scholar 

  21. H.K. Tönshoff, C. Momma, A. Ostendorf, S. Nolte, G. Kamlage, J. Laser Appl. 12, 23 (2000)

    Article  ADS  Google Scholar 

  22. S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. Von Alvensleben, H. Welling, Appl. Phys. A Mater. Sci. Process. 68, 563 (1999)

    Article  ADS  Google Scholar 

  23. J. Jyothi, A. Biswas, P. Sarkar, A. Soum-Glaude, H.S. Nagaraja, H.C. Barshilia, Appl. Phys. A Mater. Sci. Process. 123, (2017)

  24. M.N. Polyanskiy, Refractive index database, https://refractiveindex.info. Accessed 26 Mar 2022

Download references

Funding

National Natural Science Foundation of China, 52075287, Guisheng Zou, 52105372, Ying Wu.

Author information

Authors and Affiliations

  1. State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, 100084, People’s Republic of China

    Zhanwen A, Guisheng Zou, Wenzheng Zhao, Bin Feng, Chengjie Du, Yuxi Wu, Yu Xiao, Jinpeng Huo, Ying Wu & Lei Liu

  2. School of Mechanical Engineering, Qinghai University, Xining, 810016, Qinghai, People’s Republic of China

    Zhanwen A

Authors
  1. Zhanwen A
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Guisheng Zou
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Wenzheng Zhao
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Bin Feng
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Chengjie Du
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Yuxi Wu
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Yu Xiao
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. Jinpeng Huo
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. Ying Wu
    View author publications

    You can also search for this author in PubMed Google Scholar

  10. Lei Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Lei Liu.

Ethics declarations

Conflict of interest

The authors have no competing interests to declare that are relevant to the content of this article.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Supplementary Information

Below is the link to the electronic supplementary material.

Supplementary file1 (DOCX 3839 KB)

Supplementary file2 (MP4 3588 KB)

Rights and permissions

Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

A, Z., Zou, G., Zhao, W. et al. The mechanism of irregular hole-shape formation during ultrafast laser micro-drilling of metals. Appl. Phys. A 129, 120 (2023). https://doi.org/10.1007/s00339-022-06358-3

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s00339-022-06358-3

Keywords

Search

Navigation