Skip to main content
SpringerLink
Log in

Development of a high-power LC circuit for generating arc plasma and diagnostic via optical emission spectroscopy

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

This study presents the development of a high-power LC circuit for generating arc plasma in a vacuum, utilizing argon as the working gas. Arc plasma is generated by applying 900 W of high power to two pin–plate electrodes, resulting in powerful electric fields that excite and ionize argon particles. The system's I–V characteristics were investigated. Optical emission spectroscopy is a technique for diagnosing plasma formation that calculates electron temperature and density for various powers at varying pressures. This design allowed for a high deposition rate within an exceptionally short time, up to 25 s. Thin films of 229, 346, 468, and 592 nm thicknesses are deposited on glass at 100, 300, 600, and 900 W deposition powers. This design's key characteristic is used in the production of electrodes that are deposited on the glass. The electrical resistivity of films has been studied as a function of film thickness. The 4-point probe technique was used to assess those parameters. For the ranges investigated, the film's resistivity decreases linearly with its thickness.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13
Fig. 14

Similar content being viewed by others

References

  1. K. Lotfy, S.M. Khalil, H.J.J.O.T. Abd EL-Raheem, A. Physics, Inactivation by helium cold atmospheric pressure plasma for Escherichia coli and Staphylococcus aureus. J. Theor. Appl. Phys. 14, 37–45 (2020)

  2. A. Sakudo, Y. Yagyu, T.J.I.J.O.M.S. Onodera, Disinfection and sterilization using plasma technology: fundamentals and future perspectives for biological applications. Int. J.Mol. Sci. 20, 5216 (2019)

    Article  Google Scholar 

  3. A.R. Millner, Power electronics topologies for plasma generators. In: 2008 IEEE International Symposium on Industrial Electronics. IEEE, pp. 359–362 (2008)

  4. W.S. Hussein, A.F. Ahmed, K.A. Aadim, Influence of laser energy and annealing on structural and optical properties of cds films prepared by laser induced plasma. Iraqi J. Sci. 61(6), 1307–1312 (2020)

  5. A.F. Ahmed, W.I. Yaseen, Q.A. Abbas, F.A‑H. Mutlak, Plasma treatment effect on SnO2–GO nano‑heterojunction: fabrication, characterization and optoelectronic applications. Appl. Phys. A 127, 746 (2021)

  6. Q.A. Abbas, A.F. Ahmed, F.A.-H. Mutlak, Spectroscopic analysis of magnetized hollow cathode discharge plasma characteristics. Optik Int. J. Light Electron Opt. 242, 167260 (2021)

  7. A.F. Ahmed, K.A. Aadim, A.A. Yousef, Spectroscopic study of AL nitrogen plasma produced by DC glow discharge. Iraqi J. Sci. 59(1C), 494–501 (2018)

  8. K. Wang, M. Xu, Y. Gu, Z. Gu, J. Liu, Q.H.J.N.E. Fan, Low-temperature plasma exfoliated n-doped graphene for symmetrical electrode supercapacitors. Nano Energy 31, 486–494 (2017)

    Article  Google Scholar 

  9. M. Birle, C. Leu, S. Bauer, Design and application of a high-frequency high-voltage generator. In: On Internations Symposium on High Voltage (2011)

  10. F., Mehmood, T. Kamal, U Ashraf, Generation and applications of plasma (an academic review) (2018)

  11. N. Misra, O. Schluter, P.J. Cullen, Cold Plasma in Food and agriculture: Fundamentals and Applications (Academic Press, Cambridge, 2016)

    Google Scholar 

  12. H.-H. Ley, Analytical methods in plasma diagnostic by optical emission spectroscopy: a tutorial review. J. Sci. Technol. 6 (2014)

  13. K. Chaudhary, U. Tariq, S. Roslan, O. Shude, M.J.J.T. Aziz, Optical emission spectroscopy of carbon arc discharge plasma 74 (2015)

  14. I.P. Herman, Optical Diagnostics for thin Film Processing (Elsevier, London, 1996)

    Google Scholar 

  15. C. Yu, L. Xiao-Liang, X. Wen-Duo, S. Shao-Hua, S. Ming-Ze, D. Peng-JI, S. Yan-Chao, L. Zuo-Ye, H.J.C.P.L. BI-,Tao characterization of femtosecond laser-induced plasma under low pressure in argon. 32, 035203 (2015)

  16. N. Konjevic, A. Lesage, J.R. Fuhr, W.L.J.J.O.P. Wiese, C.R. DATA, Experimental stark widths and shifts for spectral lines of neutral and ionized atoms (a critical review of selected data for the period 1989 through 2000) 31, 819–927 (2002)

  17. L. I. Maissel, R.J.N.Y. Glang, Handbook of Thin Film Technology.McGraw-Hill. p. 12–21 (1970)

  18. E. Ezeobele, I.J.A.S.A.I.J.O.S. Ezenwa, Optical properties of silver aluminium sulphide ternary thin films deposited by chemical bath method. AFRREV STECH Int. J. Sci. Technol. 4, 45–57 (2015)

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Astronomy and Space, College of Science,, University of Baghdad, Baghdad, Iraq

    Waleed Ibrahim Yaseen, Ala F. Ahmed & Duraid A. Al-Shakarchi

  2. Department of Physics, College of Science, University of Baghdad, Baghdad, Iraq

    Falah A.-H. Mutlak

Authors
  1. Waleed Ibrahim Yaseen
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Ala F. Ahmed
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Duraid A. Al-Shakarchi
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Falah A.-H. Mutlak
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Falah A.-H. Mutlak.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Yaseen, W.I., Ahmed, A.F., Al-Shakarchi, D.A. et al. Development of a high-power LC circuit for generating arc plasma and diagnostic via optical emission spectroscopy. Appl. Phys. A 128, 148 (2022). https://doi.org/10.1007/s00339-022-05301-w

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s00339-022-05301-w

Keywords

Search

Navigation